2008
DOI: 10.1016/j.jmatprotec.2007.06.083
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Laser micromachining of the materials using in microfluidics by high precision pulsed near and mid-ultraviolet Nd:YAG lasers

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Cited by 34 publications
(14 citation statements)
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“…The common problems associated with conventional micromachining are tool wear and force-induced damage on ceramic components. 120 These problems can be adequately addressed by using thermal softening by a laser heat source during micro-machining. Thus, laser micro-machining of structural ceramics is still a gray area and has immense potential for research and applications.…”
Section: Laser Micromachiningmentioning
confidence: 99%
“…The common problems associated with conventional micromachining are tool wear and force-induced damage on ceramic components. 120 These problems can be adequately addressed by using thermal softening by a laser heat source during micro-machining. Thus, laser micro-machining of structural ceramics is still a gray area and has immense potential for research and applications.…”
Section: Laser Micromachiningmentioning
confidence: 99%
“…Infrared lasers (such as carbon dioxide lasers, widely used for machining and processing) for example, have proven feasible for fabrication of polymer and glass components for microfluidic devices 16,18,37,42,44. Employing ultraviolet lasers for micromachining, on the other hand, allows not only for improved resolution (due to the several-fold decrease in the diffraction limit), but also for utilization of photochemical ablation (due to the photoexcitation at relatively high frequencies) 14,37…”
Section: Development Of Papmentioning
confidence: 99%
“…This may be explained by the fact that quartz is totally transparent at the wavelength employed, while the glass is highly absorptive. Absorbed energy generates heat, causing the nanofilaments to be removed faster, and a certain amount of the solidified molten material remains in the cutting kerfs due to the thermal processes associated with nanosecond pulse laser ablation [22,23].…”
Section: Resultsmentioning
confidence: 99%