Laser modulation mapping on an unmodified laser scanning microscope

Zachariasse, Frank; Boon, G Gerben; Faggion, G.; Sarault, Keith

doi:10.1016/j.microrel.2010.07.054

Cited by 2 publications

(1 citation statement)

References 3 publications

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“…8 Recent publications on scan chain diagnosis suggest an efficient approach to broken scan chain FI by mapping the frequency of toggling scan cells to identify suspected failure flops in broken chains. [9][10][11] In this technique, a continuous near-infrared (NIR) laser scans the die region of interest while the scan cells are set to toggle at a known frequency via the scan-in data pin. The reflected laser beam modulates according to the change in surface optical reflectivity at locations where the transistors in the scan cell toggles.…”

Section: Introductionmentioning

confidence: 99%

Effectiveness of frequency mapping on 28 nm device broken scan chain failures

Goh

Pan

You

et al. 2012

Review of Scientific Instruments

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Frequency mapping methodology is an effective diagnostic tool for detection of manufacturing defects in scan chains. It analyses reflected laser modulations from toggling scan cells to localize defective scan path or scan cell. In this paper, we demonstrate experimentally that the use of solid immersion lens technology to enhance signal and spatial resolution is not a prerequisite for this technique up till 28 nm technology node. We present case studies to show the effectiveness of frequency mapping for detecting systematic and random broken scan chain failures on a 28 nm technology node test chip. We achieved 81% success rate in this methodology.

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Section: Introductionmentioning

confidence: 99%

Effectiveness of frequency mapping on 28 nm device broken scan chain failures

Goh

Pan

You

et al. 2012

Review of Scientific Instruments

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Integrated Circuit Super-Resolution Failure Analysis with Solid Immersion Lenses

Vigil

Yurt

et al. 2014

EDFA Technical Articles

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Researchers at Boston University have made significant improvements in the resolution that can be achieved with backside imaging techniques. In this article, they explain how they optimize lateral and longitudinal resolution of IR-based methods using aplanatic solid immersion lenses in combination with adaptive optics that correct for aberrations, interferometry to improve signal-to-noise ratios, vortex beams that overcome diffraction limitations, and image reconstruction techniques based on prior knowledge about the objects under investigation.

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Laser modulation mapping on an unmodified laser scanning microscope

Cited by 2 publications

References 3 publications

Effectiveness of frequency mapping on 28 nm device broken scan chain failures

Effectiveness of frequency mapping on 28 nm device broken scan chain failures

Integrated Circuit Super-Resolution Failure Analysis with Solid Immersion Lenses

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