We report on buried planar waveguides in a highly nonlinear infrared transmitting chalcogenide glass, fabricated using a combination of inverted deposition of the molten glass phase and high-velocity spinning. Films of gallium lanthanum sulphide ͑Ga: La: S͒ glass were deposited onto an expansion coefficient matched Ga: La: S cladding substrate. These amorphous films, with an optimized composition designed to be resistant against crystallization, were observed to have an excellent interface quality and uniformity. The designed planar chip had a buried core, 6 m thick in the vertical direction, in single-mode operation at 1.064 m and a measured propagation loss of Ͻ0.2 dB cm −1 . Through this technique waveguides from Ga: La: S glass, a highly versatile optical semiconductor material, can potentially be used in nonlinear applications as well as provide passive and active integrated optic functionality into the infrared beyond 5 m. © 2005 American Institute of Physics. ͓DOI: 10.1063/1.1856686͔Highly nonlinear glass has the potential to address a wide range of technologies. However, the development of this glass technology in planar platforms currently lags a generation behind conventional glass ͑silica based͒ integrated optic research and development. A highly nonlinear IR and transmitting thin film/planar device can effectively operate in a variety of systems, e.g., optical switches and lasers, modulators, sensors, grating based devices, IR radiation conduits, antireflection coatings, data storage, and generation of supercontinuum. 1-4 Some examples of highly nonlinear materials include As-S, As-Se, Ge-S, Ge-Se-Te, and Ga-La-S. The increasing sophistication of the industries requiring optical thin films from unconventional materials calls for alternative fabrication methods to be matured, which is the subject of this letter. 5 In the highly nonlinear and IR transmitting family of materials, in particular the chalcogenide glasses ͑ChGs͒, the synthesis of thin films have been reported. 6-9 Chalcogenide glasses contain elements from group VI of the periodic table as glass-forming anions and are generally opaque in the visible, with the exception of some sulphide glasses, and exhibit transparency extending into the longer infrared wavelengths ͑5-15 m͒ as compared with conventional glasses. The high nonlinear refractive index, enhanced IR transmission coupled with reduced phonon energy, and the ability to exhibit localized photoinduced material changes ͑reversible or irreversible͒, suggest these glasses are indeed fascinating candidates for planar waveguide development. A noteworthy member of the ChG family is the gallium lanthanum sulphide ͑Ga: La: S͒ glass system, having an optical transparency between 0.5 and 10 m, a high glass transition temperature ͑T g ͒ of 580°C, high solubility of rare-earths, transition, and precious metals ͑e.g., silver and platinum͒ and controllable photosensitivity. 10 In addition, it has been reported that Ga: La: S optical glass has the highest optical nonlinearity as compared with other ...