Laser photolysis of trimethoxysilane: chemical vapour deposition of nanostructured silicone powders with SiH and SiOCH₃ bonds

Abstract

Gas-phase photolysis of trimethoxysilane, achieved for the first time by focused ArF laser radiation at 193 nm, yields C 1,2 hydrocarbons, methanol and carbon monoxide along with ultrafine nanostructured silicone powder possessing -SiO 3 and SiO 4 configurations and Si-H and Si-OCH 3 bonds. The photolytic process, resulting in efficient removal of the methyl groups, is explained as a multitude of steps involving cleavages of all the available bonds.