Laser power dependence of particulate formation on pulse laser deposited films

Watanabe, Yoshihisa; Tanamura, Mitsuru; Matsumoto, Shinya; Seki, Y.

doi:10.1063/1.360179

Cited by 15 publications

(11 citation statements)

References 29 publications

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“…In this latter case the gaseous phases nucleate and cause volume expansion which leads to explosive sublimation. In the superheated regions target material segregates and after some pulses is ejected in form of submicron particles [47], known to have a different chemical composition from the target as observed in HTC [36,47] and LSMO [37,38].…”

Section: Discussionmentioning

confidence: 99%

Conditions for the growth of smooth La0.7Sr0.3MnO3 thin films by pulsed electron ablation

et al. 2013

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We report on the optimisation of the growth conditions of manganite La 0.7 Sr 0.3 MnO 3 (LSMO) thin films prepared by Channel Spark Ablation (CSA). CSA belongs to pulsed electron deposition methods and its energetic and deposition parameters are quite similar to those of pulsed laser deposition. The method has been already proven to provide manganite films with good magnetic properties, but the films were generally relatively rough (a few nm coarseness). Here we show that increasing the oxygen deposition pressure with respect to previously used regimes, reduces the surface roughness down to unit cell size while maintaining a robust magnetism. We analyse in detail the effect of other deposition parameters, like accelerating voltage, discharging energy, and temperature and provide on this basis a set of optimal conditions for the growth of atomically flat films. The thicknesses for which atomically flat surface was achieved is as high as about 10-20 nm, corresponding to films with room temperature magnetism. We believe such magnetic layers represent appealing and suitable electrodes for various spintronic devices.

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Section: Discussionmentioning

confidence: 99%

Conditions for the growth of smooth La0.7Sr0.3MnO3 thin films by pulsed electron ablation

et al. 2013

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“…Similar findings were observed in many other studies. 24,25 The particulate formation is enhanced by the kinetic energy associated with the ablated material prior to deposition 26 and by inhomogeneous laser heating that causes segregates, 27 or phase explosion. 28 The ns-laser ablation is known to produce large numbers of molten droplets by hydrodynamic sputtering.…”

Section: Pulse Energymentioning

confidence: 99%

Pulsed laser deposition to synthesize the bridge structure of artificial nacre: Comparison of nano- and femtosecond lasers

Melaibari

Molian

2012

Journal of Applied Physics

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Nature offers inspiration to new adaptive technologies that allow us to build amazing shapes and structures such as nacre using synthetic materials. Consequently, we have designed a pulsed laser ablation manufacturing process involving thin film deposition and micro-machining to create hard/soft layered “brick-bridge-mortar” nacre of AlMgB14 (hard phase) with Ti (soft phase). In this paper, we report pulsed laser deposition (PLD) to mimic brick and bridge structures of natural nacre in AlMgB14. Particulate formation inherent in PLD is exploited to develop the bridge structure. Mechanical behavior analysis of the AlMgB14/Ti system revealed that the brick is to be 250 nm thick, 9 μm lateral dimensions while the bridge (particle) is to have a diameter of 500 nm for a performance equivalent to natural nacre. Both nanosecond (ns) and femtosecond (fs) pulsed lasers were employed for PLD in an iterative approach that involves varying pulse energy, pulse repetition rate, and target-to-substrate distance to achieve the desired brick and bridge characteristics. Scanning electron microscopy, x-ray photoelectron spectroscopy, and optical profilometer were used to evaluate the film thickness, particle size and density, stoichiometry, and surface roughness of thin films. Results indicated that both ns-pulsed and fs-pulsed lasers produce the desired nacre features. However, each laser may be chosen for different reasons: fs-pulsed laser is preferred for much shorter deposition time, better stoichiometry, uniform-sized particles, and uniform film thickness, while ns-pulsed laser is favored for industrial acceptance, reliability, ease of handling, and low cost.

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“…Generally, two types of particles are distinguished: 3 droplets ͑large particles with a diameter Ͼ0.5 m that are transferred directly from the tar-get͒ and precipitates ͑secondary phases͒. The density of droplets is reduced by lowering the laser beam fluence, 4,5 changing the deposition geometry, 6 using velocity filtration, 7 or crossed flux techniques. 8 It has also been shown that carefully preparing and conditioning the target material significantly reduces the droplet density.…”

Section: High-quality Off-stoichiometric Yba 2 Cu 3 O 7؊␦ Films Produmentioning

confidence: 99%

“…Generally, the droplet density increases with fluence. 4,5,10 Since on amorphous films all particles are droplets, the droplet density can directly be determined by means of optical microscopy. We find that the droplet density on amorphous films increases somewhat with fluence, but the absolute density is always low (Ͻ10 4 per cm 2 ).…”

Section: A Amorphous Yba 2 Cu 3 O 6؉x Filmsmentioning

confidence: 99%

High-quality off-stoichiometric YBa2Cu3O7−δ films produced by diffusion-assisted preferential laser ablation

Huijbregtse

Dam

Rector

et al. 1999

Journal of Applied Physics

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The fluence dependence of the composition of pulsed-laser deposited YBa 2 Cu 3 O 7Ϫ␦ films is investigated and interpreted in terms of laser-induced target modification. Both target degradation ͑at fluence JϽ1.0 J/cm 2 ) and diffusion-assisted preferential ablation (1.0ϽJϽ1.3 J/cm 2 ) are found to be responsible for nonstoichiometric transfer. A one-dimensional, moving-boundary diffusion model is developed to describe diffusion-assisted preferential ablation. This model predicts stoichiometric transfer at large ablation rates. Indeed, for Jӷ1.3 J/cm 2 stoichiometric deposition is found, resulting in precipitate-free films. However, slightly off-stoichiometric films, deposited in the diffusion-assisted preferential ablation regime, exhibit the best superconducting properties (T c ϭ91.0 K, ⌬T c ϭ0.4 K) and can be produced with a remarkably high reproducibility.

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Laser power dependence of particulate formation on pulse laser deposited films

Cited by 15 publications

References 29 publications

Conditions for the growth of smooth La0.7Sr0.3MnO3 thin films by pulsed electron ablation

Conditions for the growth of smooth La0.7Sr0.3MnO3 thin films by pulsed electron ablation

Pulsed laser deposition to synthesize the bridge structure of artificial nacre: Comparison of nano- and femtosecond lasers

High-quality off-stoichiometric YBa2Cu3O7−δ films produced by diffusion-assisted preferential laser ablation

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