Laser printer patterned sacrificed layer for arbitrary design and scalable fabrication of the all-solid-state interdigitated in-planar hydrous ruthenium oxide flexible micro supercapacitors

Laser fabrication of functional micro-supercapacitors

“…Currently, the printed toner pattern on the flexible PET or paper substrates is usually used as the sacrificed mask to fabricate the inplane MSCs, which can be also acquired by one-step printing with a commercial laser printer. With the assistance of printed masks and deposition technique, various pseudocapacitive materials (conduc- tive polymers [109], MXenes [229], MnO 2 [230] and RuO 2 [59]) can be designed into patterned microelectrodes on the flexible substrates. In 2016, Ye's team designed a laser printed pattern on a PET film as the mask to construct the microelectrodes (Fig.…”

“…Most importantly, computer-controlled laser system has an irreplaceable advantage than other techniques, which allows processing the devices from one-dimensional (1D) [53] to two-dimensional (2D) [54], even three-dimensional (3D) [55]. Particularly, laser technology is widely used in the fabrication of 2D MSCs, in which the 2D coplanar microelectrodes with different shapes are designed through photolithography [56], laser cutting [57], laser writing [58] and laser printing [59] strategies. Besides, the parameters of the gap between electrodes, electrode width and electrode length can also be accurately controlled [60].…”

Spin-Coated Heterogenous Stacked Electrodes for Performance Enhancement in CMOS-Compatible On-Chip Microsupercapacitors

“…Furthermore, rGO can be combined with several functionalization agents to improve the capability of MSCs in the above-mentioned terms. 32 Spin-coated MSCs geared toward CMOS compatibility have been fabricated by Huang et al 33 through laser cutting patterns on a Kapton tape mask on a Si substrate. The material is spin coated on the exposed surfaces to fabricate interdigitated electrodes.…”

Effect of Redox Additive Electrolyte on the Electrochemical Performance of MnO2 Nanorods for Supercapacitor Application

“…Commonly pseudocapacitor electrodes are made up of metal oxides such as NiO [2], RuO 2 [3], Co 3 O 4 [4], MnO 2 [5], TiO 2 [6], CeO 2 [7] etc. Among the various transition metal oxides, manganese oxide has gained great deal of attention as a pseudocapacitor electrode material due to its superior supercapacitor performance, low-cost and environmental compatibility [8].…”