Flexible
in-plane architecture micro-supercapacitors (MSCs) are
competitive candidates for on-chip miniature energy storage applications
owing to their light weight, small size, high flexibility, as well
as the advantages of short charging time, high power density, and
long cycle life. However, tedious and time-consuming processes are
required for the manufacturing of high-resolution interdigital electrodes
using conventional approaches. In contrast, the laser processing technique
enables high-efficiency high-precision patterning and advanced manufacturing
of nanostructured electrodes. In this review, the recent advances
in laser manufacturing and patterning of nanostructured electrodes
for applications in flexible in-plane MSCs are comprehensively summarized.
Various laser processing techniques for the synthesis, modification,
and processing of interdigital electrode materials, including laser
pyrolysis, reduction, oxidation, growth, activation, sintering, doping,
and ablation, are discussed. In particular, some special features
and merits of laser processing techniques are highlighted, including
the impacts of laser types and parameters on manufacturing electrodes
with desired morphologies/structures and their applications on the
formation of high-quality nanoshaped graphene, the selective deposition
of nanostructured materials, the controllable nanopore etching and
heteroatom doping, and the efficient sintering of nanometal products.
Finally, the current challenges and prospects associated with the
laser processing of in-plane MSCs are also discussed. This review
will provide a useful guidance for the advanced manufacturing of nanostructured
electrodes in flexible in-plane energy storage devices and beyond.