Laser scribing of indium tin oxide (ITO) thin films deposited on various substrates for touch panels

Tseng, Shih Feng; Hsiao, Wen‐Tse; Huang, Kuo Cheng; Chiang, Donyau; Chen, Mingfei; Chou, Chang‐Pin

doi:10.1016/j.apsusc.2010.08.080

Cited by 85 publications

(27 citation statements)

References 12 publications

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“…[1][2][3][4][5][6] In recent years, numerous research attempts have focused on transparent conducting oxides (TCOs) because of their excellent metallic electrical conductivity with high transmittance in the visible range of the electromagnetic spectrum or light. As a result, TCOs such as In 2 O 3 , ZnO, SnO 2 , MoO 3 , and WO 3 currently play important roles in flat-panel displays, 1,2 touch panels, 11 energy-harvesting-device windows, 1,8 and light-emitting diodes. As a result, TCOs such as In 2 O 3 , ZnO, SnO 2 , MoO 3 , and WO 3 currently play important roles in flat-panel displays, 1,2 touch panels, 11 energy-harvesting-device windows, 1,8 and light-emitting diodes.…”

Section: Introductionmentioning

confidence: 99%

Sol–Gel‐Derived High‐Performance Stacked Transparent Conductive Oxide Thin Films

et al. 2014

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Single‐ and multi‐layer transparent conductive oxide (TCO) thin films exhibiting high performance, good packing density and low surface/interface roughness are deposited on silica glass substrates by the sol–gel method. The crystal and microstructural properties of the TCO thin films are evaluated as an alternate to films prepared by ultra‐high vacuum deposition. Tin‐doped indium oxide (ITO) thin films produced using a two‐step drying process showed low surface roughness because of dense packing structure not only horizontal but also vertical directions. As a result, electrical conductivity, carrier concentration, carrier mobility, and optical transmittance of 2.3 × 103 S/cm, 8 × 1020 cm−3, 18 cm2/Vs, and over 98% at 500 nm, respectively, were achieved. A multilayer ZnO/ITO stacked structure was also fabricated using the sol–gel process. Our findings suggest that solution‐based methods show promise as an alternative to existing ultra‐high vacuum methods to fabricate TCO thin films.

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Section: Introductionmentioning

confidence: 99%

Sol–Gel‐Derived High‐Performance Stacked Transparent Conductive Oxide Thin Films

et al. 2014

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“…Transparent conductive electrodes are essential components for optoelectronic information (displays) and energy (solar cells) devices [1][2][3][4]. Material candidates include transparent conductive oxide (TCO) films (such as In 2 O 3 :Sn (ITO), SnO 2 :F, and doped ZnO), micro/nanoscale metal periodic grids or random networks, carbon nanomaterials (such as carbon nanotube and graphene), and conductive polymer [5].…”

Section: Introductionmentioning

confidence: 99%

Effect of thermal annealing on the performance of WO 3 –Ag–WO 3 transparent conductive film

Lin

Lan

et al. 2014

Thin Solid Films

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“…Sn-doped In 2 O 3 can be integrated into solar cells, smart windows, photocurrent generators, displays, and light-emitting diodes [7,8]. However, most studies on Sn-doped In 2 O 3 have mainly focused on its thin-film structure because of the numerous applications of this material in optoelectronic and electronic devices [9,10]. By contrast, there are few works on Sn-doped In 2 O 3 regarding its 1D structure.…”

Section: Introductionmentioning

confidence: 99%

Self-catalytic crystal growth, formation mechanism, and optical properties of indium tin oxide nanostructures

Liang

Zhong

2013

Nanoscale Res Lett

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In-Sn-O nanostructures with rectangular cross-sectional rod-like, sword-like, and bowling pin-like morphologies were successfully synthesized through self-catalytic growth. Mixed metallic In and Sn powders were used as source materials, and no catalyst layer was pre-coated on the substrates. The distance between the substrate and the source materials affected the size of the Sn-rich alloy particles during crystal growth in a quartz tube. This caused In-Sn-O nanostructures with various morphologies to form. An X-ray photoelectron spectroscope and a transmittance electron microscope with an energy-dispersive X-ray spectrometer were used to investigate the elemental binding states and compositions of the as-synthesized nanostructures. The Sn doping and oxygen vacancies in the In2O3 crystals corresponded to the blue-green and yellow-orange emission bands of the nanostructures, respectively.

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Laser scribing of indium tin oxide (ITO) thin films deposited on various substrates for touch panels

Cited by 85 publications

References 12 publications

Sol–Gel‐Derived High‐Performance Stacked Transparent Conductive Oxide Thin Films

Sol–Gel‐Derived High‐Performance Stacked Transparent Conductive Oxide Thin Films

Effect of thermal annealing on the performance of WO 3 –Ag–WO 3 transparent conductive film

Self-catalytic crystal growth, formation mechanism, and optical properties of indium tin oxide nanostructures

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