Laser sintering of oxidized copper nanoparticles deposited by dry aerosol printing

Abstract

Sintering of oxidized copper nanoparticles arrays in the form of lines by the local treatment of laser radiation with wavelengths of 527 nm and 980 nm was studied. To form lines with a width equal to 40–150 μm and a thickness equal to 0.5–4 μm focused aerosol jets with average nanoparticle sizes of 110 and 65 nm were used. The production of semiconductor arrays from oxidized copper nanoparticles with a specific electrical resistance of 2⋅10−3 Ω⋅m using laser radiation with a wavelength of 980 nm was demonstrated.