2003
DOI: 10.1063/1.1570928
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Laser synthesis of carbon-rich SiC nanoribbons

Abstract: A nanosecond pulsed laser direct-write and doping (LDWD) technique is used for the fabrication of carbon-rich silicon carbide nanoribbons heterostructure in a single crystal 4H–SiC wafer. Characterization by high-resolution transmission electron microscope and selected area electron diffraction pattern revealed the presence of nanosize crystalline ribbons with hexagonal graphite structure in the heat-affected zone below the decomposition temperature isotherm in the SiC epilayer. The nanoribbons exist in three … Show more

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Cited by 46 publications
(31 citation statements)
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“…In situ fabrication of the SiC nanowires in some designed substrates such as SiC or Al 2 O 3 might provide a solution to the nanomanipulation problem with an attendant reduction in the fabrication steps. Such an effort has been made in recent work by Salama et al [13], in which a laser direct-write process to fabricated carbon rich SiC nanoribbons in a 4H-SiC single crystal wafer was discussed. The proposed laser process enables the fabrication of nanoribbon-SiC heterostructures directly within the SiC wafer and thus eliminated the need for nanostructure transferring from one medium to another, although a graphite layer was also produced.…”
Section: Introductionmentioning
confidence: 96%
“…In situ fabrication of the SiC nanowires in some designed substrates such as SiC or Al 2 O 3 might provide a solution to the nanomanipulation problem with an attendant reduction in the fabrication steps. Such an effort has been made in recent work by Salama et al [13], in which a laser direct-write process to fabricated carbon rich SiC nanoribbons in a 4H-SiC single crystal wafer was discussed. The proposed laser process enables the fabrication of nanoribbon-SiC heterostructures directly within the SiC wafer and thus eliminated the need for nanostructure transferring from one medium to another, although a graphite layer was also produced.…”
Section: Introductionmentioning
confidence: 96%
“…Verspui and Knippenherg [10] utilized lanthanum as catalyst to vaporize and form ␣-SiC whiskers on nucleation sites on the bulk SiC by the re-deposition technology, but the fabrication temperature was too high. Salama and Quick [11] fabricated rich-carbon SiC nano ribbons in a 4H-SiC single crystal wafer by a laser directwrite process. Yang et al [12] synthesized SiC nanowires in the RS-SiC plate by in situ chemical vapor growth process.…”
Section: Introductionmentioning
confidence: 99%
“…[23][24][25][26] Experimentally, different polymorphs of SiC nanoribbons have been synthesized via several routes. [27][28][29][30][31] For example, via a catalyst-free route at a relatively low growth temperature, wurtzite-type SiC (2H-SiC) nanoribbons have been fabricated, 27 which are tens to hundreds of microns in length, a few microns in width and tens of nanometers in thickness. By a lithium-assisted synthetic route or the thermal evaporation approach, SiC (3C-SiC) nanoribbons have been obtained.…”
Section: Introductionmentioning
confidence: 99%