Laser treatment of aluminum oxide ceramics substrates surface for microwave hybrid IC's

Abstract

Results of research of near-surface layer of aluminum oxide ceramics substrates for microwave hybrid IC's (MHIC's) are presented. Layers were produced by treatment of laser beam (1.06 μm wavelength) exposure -laser treatment (LT). The composition and structure of near-surface layer were researched by methods of electron microscopy and IR Fourier spectroscopy. It was shown that in case of LT the chevron texture occurred as a result of ceramics melting with near-surface layer stoichiometry violation sideways deficiency in oxygen. There were researched mechanical properties of modified layers by method of microhardness indentation with use of Vickers diamond pyramid. It was established that destruction viscosity factor increases up to 6% at the expense of compressing elastic stress occurrence due to processes of melting and crystallization.