Laser trimming of NiCr thin film resistors I: Thin film resistors without a protective layer

Schultze, V.; Fischer, A.

doi:10.1016/0040-6090(89)90240-x

Cited by 5 publications

(3 citation statements)

References 15 publications

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“…Since many applications of short-pulse lasers involve interactions with microstructures, it is necessary to investigate size effects on these properties, i.e., laser trimming of thin film resistors (Schultze and Fischer, 1989) and laser damage of thin films (Guenther and Mclver, 1989). This paper presents a theoretical study of the size effects, due to both surface and grain boundary scattering, on the thermal conductivity and the electron-phonon coupling factor during nonequilibrium laser heating of metals.…”

Section: Introductionmentioning

confidence: 99%

Size Effects on Nonequilibrium Laser Heating of Metal Films

Qiu

Tien

1993

Journal of Heat Transfer

146

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Picosecond and sub-picosecond lasers have become important tools in the fabrication and study of microstructures. When the laser pulse duration becomes comparable with or less than the characteristic-time of energy exchange among microscopic energy carriers, the excited carriers are no longer in thermal equilibrium with the other carriers, creating a nonequilibrium heating situation. The presence of interfaces in metals provides additional scattering processes for electrons, which in turn affects the nonequilibrium heating process. This work studies size effects, due to both surface scattering and grain-boundary scattering, on the thermal conductivity and the energy exchange between electrons and the material lattice. A simple formula is established to predict the influence of film thickness, grain size, interface scattering parameters, and the electron and lattice temperatures on the effective thermal conductivity of metal thin films. Predictions of the analysis agree with the available experimental data. A three-energy-level model is developed to characterize the energy exchange between electrons and the lattice. This study shows that the size effect reduces the effective thermal conductivity and increases the electron-phonon energy exchange rate. The results are useful for improving processing quality, interpreting diagnostic results, and preventing thermal damage of thin films during short-pulse laser heating.

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Section: Introductionmentioning

confidence: 99%

Size Effects on Nonequilibrium Laser Heating of Metal Films

Qiu

Tien

1993

Journal of Heat Transfer

146

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“…manufacturing where uses span lithography [1], thin film resistor trimming [2], and thin film transistor (TFT) manufacturing (through the super-lateral growth [SLG] technique) [3,4], to name a few. Building on excimer laser acceptance, pulsed laser melting and controlled solidification of thin metal films may become a viable processing route for retention of beneficial local microstructural modifications including, but not limited to, metastable phases and nonequilibrium supersaturations.…”

mentioning

confidence: 99%

“…Reflection micrographs of film morphologies for uncapped films after flood irradiation a) Ni 100 nm on 1 µm thermal oxide at 500 mJ/cm 2 , and b) Au 100 nm on 1 µm thermal oxide at 80 mJ/cm2 Pattern analysis to determine the nature of the dewetting events[22] (nucleation vs. instability arguments) was not attempted; regardless of origin, the liquid films dewet during the laser processing.For these uncapped films, the series of flood illumination observations over a range of fluences revealed the progression from non-melting through the partial melting and complete melting thresholds. The partial melting threshold was attributed to an onset of a sudden change in color and apparent metal surface roughening.…”

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confidence: 99%

Suppression of Dewetting in Pulsed Laser Melting of Thin Metallic Films on SiO₂

Kline

Leonard

2004

MRS Proc.

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Pulsed excimer laser projection irradiation has been successfully applied to completely melt and resolidify encapsulated elemental metal films of Au, Cu, Cr, and Ni directly on amorphous SiO2 substrates. A combination of narrow irradiated lines and appropriate SiO2 capping layers was used to obtain films that do not dewet when fully melted. Detailed processing maps were generated for Au and Ni, while equivalent trends for Cu and Cr were also noted. These systems were analyzed for common behaviors, and from these the principle factors, a basic process map is proposed to describe adequately these four systems. Experimental parameters and sample preparation criteria are presented to realize such resolidification studies in other metal systems.

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Granular Films for Use as Thin-Film Resistors

Yamadera

2008

Journal of Elec Materi

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In this paper we discuss thin-film electrical resistors utilizing granular films of the type (Co,Ni)-(Al,Si)-O and their electrical resistive properties. Resistive properties of the granular film resistors drastically change with metal content and after annealing at 450°C. The values of temperature coefficient of resistance (TCR) in the optimum metal content of the granular films were as low as those of conventional metallic alloy film resistors. The values of sheet resistance were much higher than those of conventional metallic alloy resistors. Therefore, granular films are useful for application to thin-film resistors with the goal of miniaturizing them.

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Laser trimming of NiCr thin film resistors I: Thin film resistors without a protective layer

Cited by 5 publications

References 15 publications

Size Effects on Nonequilibrium Laser Heating of Metal Films

Size Effects on Nonequilibrium Laser Heating of Metal Films

Suppression of Dewetting in Pulsed Laser Melting of Thin Metallic Films on SiO₂

Granular Films for Use as Thin-Film Resistors

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Laser trimming of NiCr thin film resistors I: Thin film resistors without a protective layer

Cited by 5 publications

References 15 publications

Size Effects on Nonequilibrium Laser Heating of Metal Films

Size Effects on Nonequilibrium Laser Heating of Metal Films

Suppression of Dewetting in Pulsed Laser Melting of Thin Metallic Films on SiO2

Granular Films for Use as Thin-Film Resistors

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Product

Resources

About

Suppression of Dewetting in Pulsed Laser Melting of Thin Metallic Films on SiO₂