Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
DOI: 10.1109/sensor.1997.635226
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Latched valve manifolds for efficient control of pneumatically actuated valve arrays

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Cited by 8 publications
(1 citation statement)
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“…Valves allow dynamically changing the connectivity among the components of the microar-chitecture as required by different instructions under execution. Microvalves have been known for a decade [10,18] but have not been practical in highly-integrated LoCs due to complex fabrication procedures and chemical and physical incompatibilities.…”
Section: Background and Related Workmentioning
confidence: 99%
“…Valves allow dynamically changing the connectivity among the components of the microar-chitecture as required by different instructions under execution. Microvalves have been known for a decade [10,18] but have not been practical in highly-integrated LoCs due to complex fabrication procedures and chemical and physical incompatibilities.…”
Section: Background and Related Workmentioning
confidence: 99%