Lateral Extensional Mode Piezoelectric ZnO-on-Nickel RF MEMS Resonators for Back-End-of-Line Integration

Zaman, Adnan; Alsolami, Abdulrahman; Wei, Max; Rivera, Ivan; Baghelani, Masoud; Wang, Jing

doi:10.3390/mi14051089

Cited by 3 publications

(1 citation statement)

References 35 publications

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“…Various microsensors [19][20][21][22][23], actuators [24][25][26][27][28][29], and devices [30][31][32][33][34] have been fabricated using the CMOS-MEMS technique. Photovoltaic microgenerators created through this technique offer improved efficiency, compactness, versatility, and cost-effectiveness, making them well-suited for a wide range of applications [35][36][37][38][39], including self-powered sensors, wearable devices, and internet of things (IoT).…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Characterization of Photovoltaic Microgenerators Using the Complementary Metal Oxide Semiconductor Process

Chen,

Dai

2023

Micromachines

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This study develops a photovoltaic microgenerator based on the complementary metal oxide semiconductor (CMOS) process. The photovoltaic microgenerator converts the absorbed light energy into electrical energy using the photovoltaic effect. The material for the photovoltaic microgenerator is silicon, and its structure consists of patterned p–n junctions. The design of the photovoltaic microgenerator utilizes a grid-like shape, forming a large-area p–n junction with a patterned p-doping and N-well structure to enhance the photocurrent and improve the device’s performance. The photovoltaic microgenerator is fabricated employing the CMOS process with post-processing step. Post-processing is applied to enhance the microgenerator’s light absorption and energy-conversion efficiency. This involves using wet etching with buffered-oxide etch (BOE) to remove the silicon dioxide layer above the p–n junctions, allowing direct illumination of the p–n junctions. The area of the photovoltaic microgenerator is 0.79 mm2. The experimental results show that under an illumination intensity of 1000 W/m2, the photovoltaic microgenerator exhibits an open-circuit voltage of 0.53 V, a short-circuit current of 233 µA, a maximum output power of 99 µW, a fill factor of 0.8, and an energy-conversion efficiency of 12.5%.

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Section: Introductionmentioning

confidence: 99%

Fabrication and Characterization of Photovoltaic Microgenerators Using the Complementary Metal Oxide Semiconductor Process

Chen,

Dai

2023

Micromachines

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Q-Boosting Of Composite CMOS-MEMS Resonators By AC Current Low-Temperature Annealing

Zope,

Bhosale,

2024

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

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Piezoelectrically and Capacitively Transduced Hybrid MEMS Resonator with Superior RF Performance and Enhanced Parasitic Mitigation by Low-Temperature Batch Fabrication

Zaman,

Guneroglu,

Alsolami

et al. 2024

Applied Sciences

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This study investigates a hybrid microelectromechanical system (MEMS) acoustic resonator through a hybrid approach to combine capacitive and piezoelectric transduction mechanisms, thus harnessing the advantages of both transducer technologies within a single device. By seamlessly integrating both piezoelectric and capacitive transducers, the newly designed hybrid resonators mitigate the limitations of capacitive and piezoelectric resonators. The unique hybrid configuration holds promise to significantly enhance overall device performance, particularly in terms of quality factor (Q-factor), insertion loss, and motional impedance. Moreover, the dual-transduction approach improves the signal-to-noise ratio and reduces feedthrough noise levels at higher frequencies. In this paper, the detailed design, complex fabrication processes, and thorough experimental validation are presented, demonstrating substantial performance enhancement potentials. A hybrid disk resonator with a single side-supporting anchor achieved an outstanding loaded Q-factor higher than 28,000 when operating under a capacitive drive and piezoelectric sense configuration. This is comparably higher than the measured Q-factor of 7600 for another disk resonator with two side-supporting anchors. The hybrid resonator exhibits a high Q-factor at its resonance frequency at 20 MHz, representing 2-fold improvement over the highest reported Q-factor for similar MEMS resonators in the literature. Also, the dual-transduction approach resulted in a more than 30 dB improvement in feedthrough suppression for devices with a 500 nm-thick ZnO layer, while hybrid resonators with a thicker piezoelectric layer of 1300 nm realized an even greater feedthrough suppression of more than 50 dB. The hybrid resonator integration strategy discussed offers an innovative solution for current and future advanced RF front-end applications, providing a versatile platform for future innovations in on-chip resonator technology. This work has the potential to lead to advancements in MEMS resonator technology, facilitating some significant improvements in multi-frequency and frequency agile RF applications through the original designs equipped with integrated capacitive and piezoelectric transduction mechanisms. The hybrid design also results in remarkable performance metrics, making it an ideal candidate for integrating next-generation wireless communication devices where size, cost, and energy efficiency are critical.

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Lateral Extensional Mode Piezoelectric ZnO-on-Nickel RF MEMS Resonators for Back-End-of-Line Integration

Cited by 3 publications

References 35 publications

Fabrication and Characterization of Photovoltaic Microgenerators Using the Complementary Metal Oxide Semiconductor Process

Fabrication and Characterization of Photovoltaic Microgenerators Using the Complementary Metal Oxide Semiconductor Process

Q-Boosting Of Composite CMOS-MEMS Resonators By AC Current Low-Temperature Annealing

Piezoelectrically and Capacitively Transduced Hybrid MEMS Resonator with Superior RF Performance and Enhanced Parasitic Mitigation by Low-Temperature Batch Fabrication

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