2004
DOI: 10.1109/led.2004.833824
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Lateral Migration of Trapped Holes in a Nitride Storage Flash Memory Cell and Its Qualification Methodology

Abstract: Abstract-The negative threshold voltage ( ) shift of a nitride storage flash memory cell in the erase state will result in an increase in leakage current. By utilizing a charge pumping method, we found that trapped hole lateral migration is responsible for this shift. Hole transport in nitride is characterized by monitoring gate induced drain leakage current and using a thermionic emission model. The hole emission induced shift shows a linear correlation with bake time in a semi-logarithm plot and its slope de… Show more

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Cited by 19 publications
(2 citation statements)
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“…Charge pumping is a widely used technique that applies varying pulses to the gate to measure the DC body current for the purpose of extracting interface trap density. [ 36 ] With slight modifications of fixing the low level and rise/fall speed of the gate pulses, analyzing the lateral difference in V th along the channel length direction, or in other words, the extent of lateral migration to the Si 3 N 4 layer above the SiO 2 layer of the Side Path device, is possible. [ 37 ] The charge pumping measurement technique incorporates the notions of local V th and local flat band voltage ( V fb ), as shown in Figures 3a‐1 and 3a‐2.…”
Section: Resultsmentioning
confidence: 99%
“…Charge pumping is a widely used technique that applies varying pulses to the gate to measure the DC body current for the purpose of extracting interface trap density. [ 36 ] With slight modifications of fixing the low level and rise/fall speed of the gate pulses, analyzing the lateral difference in V th along the channel length direction, or in other words, the extent of lateral migration to the Si 3 N 4 layer above the SiO 2 layer of the Side Path device, is possible. [ 37 ] The charge pumping measurement technique incorporates the notions of local V th and local flat band voltage ( V fb ), as shown in Figures 3a‐1 and 3a‐2.…”
Section: Resultsmentioning
confidence: 99%
“…In the case of one-transistor (1T) SONOS eNVM cells shown in Fig. 1(a), the EH distribution mismatch has already been discussed elsewhere [2][3][4]. On the other hand, to the best of our knowledge, no EH distribution mismatch has been discussed so far in the case of 2T SONOS eNVM cells as shown in Fig.…”
Section: Introductionmentioning
confidence: 86%