Lateral performance evaluation of laser micromachining by high precision optical metrology and image analysis

Daemi, Bita; Ekberg, Peter; Mattsson, Lars

doi:10.1016/j.precisioneng.2017.04.008

Cited by 5 publications

(4 citation statements)

References 8 publications

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“…The coordinates of the calculated centres are mathematically aligned, by least-squares fitting a line to the callottes' central position, calculating the angle of the fitted line with respect to the x-axis of the reference coordinate system and rotating all the central positions based on the calculated angle, to remove errors due to fixturing and placement when setting up the artefact for the measurements. After the alignment, all centre locations from both the measurements of CMM and FVM are registered and overlapped, by translating the coordinate system of all the centre positions (from both the CMM and FVM measurements) to the centroid position of the centre location, based on their centroid locations [18]. After all the centre locations have been registered and overlapped, the errors of each centre's location on the grid are calculated as the difference between the centre locations measured with the FVM and centre locations measured with the CMM.…”

Section: Amplification and Linearity Errors In 2dmentioning

confidence: 99%

Lateral scale calibration for focus variation microscopy

Alburayt

Syam

Leach

2018

Meas. Sci. Technol.

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Areal surface texture measuring instruments can be calibrated by determining a set of metrological characteristics currently in the final stages of standardisation. In this paper, amplification, linearity and perpendicularity characteristics have been determined to calibrate the lateral performance of a focus variation microscope. The paper presents a novel and low-cost material measure and procedures that are used to determine the characteristics. The material measure is made of stainless steel with a cross-grating grid of hemispherical grooves. The design, manufacture and calibration of the material measure are discussed. The 20 × 20 mm grid is measured with and without image stitching. The results show that the proposed material measure and procedures can be used to determine the error of the amplification, linearity and perpendicularity characteristics. In addition, the lateral stage error can be significantly reduced by measurement with image stitching.

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Section: Amplification and Linearity Errors In 2dmentioning

confidence: 99%

Lateral scale calibration for focus variation microscopy

Alburayt

Syam

Leach

2018

Meas. Sci. Technol.

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“…This resulted in passivation properties in the non-ablated region and bulk properties of silicon in the ablated region for solar cell applications. In another study, laser beam machining of silicon wafers was attempted by Daemi et al to study the precision of micromachining of the machines [12]. Furthermore, the removal of fragile silicon substrate was also tried to achieve a freestanding micromachined structure.…”

Section: Introductionmentioning

confidence: 99%

Investigation of laser-assisted micromachining of NiTi SMA bimorph based actuators toward developing optical shutters

Gangwar,

Pandiyan,

Iyamperumal Anand

2024

J. Micromech. Microeng.

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This work explores laser-assisted micromachining for the precision cutting of NiTi SMA-based bimorph in a single-pass laser scan. NiTi SMA bimorph was fabricated using the e-beam evaporation technique followed by micromachining using a 1064 nm fiber laser. The influence of laser power, laser speed, spot diameter, and laser travel direction on kerf width and heat-affected zone after micromachining was studied using the design of experiments. The optimized parameter for micromachining was at laser power 5 W with 5 mm/s laser speed and 50 μm spot diameter. Various shapes were cut at the optimized parameter, including an optical shutter of a diameter of 30 mm. A laser speed of 6 mm/s has produced microchannels in the bimorph due to NiTi film removal only. The SEM analysis of the shutter reveals the formation of refined grains at micromachined edges compared to the center of the actuator. Fabricated optical shutter shows negligible optical transmittance in the 450 to 700 nm wavelength range.

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“…Micromachining is generally defined as the machining process that produces miniature component or feature in of the range of 1µm to 999 µm [9]. Several non-conventional methods such as micro electric discharge machining (µEDM) [10][11][12], laser micromachining [13,14], ultrasonic [15][16][17], electron beam machining (EBM) [18,19], etc. are mostly used to produce miniaturized product/feature this range.…”

Section: Introductionmentioning

confidence: 99%

Artificial Intelligence-Based Hole Quality Prediction in Micro-Drilling Using Multiple Sensors

Ranjan

Patra

Szalay

et al. 2020

Sensors

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The prevalence of micro-holes is widespread in mechanical, electronic, optical, ornaments, micro-fluidic devices, etc. However, monitoring and detection tool wear and tool breakage are imperative to achieve improved hole quality and high productivity in micro-drilling. The various multi-sensor signals are used to monitor the condition of the tool. In this work, the vibration signals and cutting force signals have been applied individually as well as in combination to determine their effectiveness for tool-condition monitoring applications. Moreover, they have been used to determine the best strategies for tool-condition monitoring by prediction of hole quality during micro-drilling operations with 0.4 mm micro-drills. Furthermore, this work also developed an adaptive neuro fuzzy inference system (ANFIS) model using different time domains and wavelet packet features of these sensor signals for the prediction of the hole quality. The best prediction of hole quality was obtained by a combination of different sensor features in wavelet domain of vibration signal. The model’s predicted results were found to exert a good agreement with the experimental results.

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Lateral performance evaluation of laser micromachining by high precision optical metrology and image analysis

Cited by 5 publications

References 8 publications

Lateral scale calibration for focus variation microscopy

Lateral scale calibration for focus variation microscopy

Investigation of laser-assisted micromachining of NiTi SMA bimorph based actuators toward developing optical shutters

Artificial Intelligence-Based Hole Quality Prediction in Micro-Drilling Using Multiple Sensors

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