The progress in IC miniaturization dictated by Moore’s Law has taken a leap from mere circuit integration to IoT enabled System-on-Chip (SoC) deployments. Such systems are connoted by contemporary advancements in the semiconductor industry roadmaps namely, ‘More-Moore’ and ‘More-than-Moore’ (MtM). For meaningful integration of digital and non-digital blocks, a power performance tradeoff is essential for maximum and fruitful utilization of the silicon area. Using the techniques under the MtM nomenclature allows the use of unconventional steep slope devices like Tunneling FETs, Negative Capacitance (NC) FETs, Gate-all-around FETs (GAA) 
and FinFETs etc., which can exhibit reasonable performance with lower supply voltages. Following the Device Technology Co-optimization (DTCO) and System Technology Co optimization (STCO) the advanced 3D heterogenous integration technologies allow sensors, analog/mixed signal and passive components to be assimilated within the same package as the CMOS blocks. Appropriate device engineering techniques like multi-gate architectures, vertical stacking transistors, compound semiconductors and alternate carrier transport phenomena are required to improve the current drive and scaling performance of advanced CMOS devices. CMOS based codesign is essential to realize new topologies for energy economical computation, sensing and information processing as the beyond CMOS steep slope devices are independently incapable of replacing conventional bulk CMOS devices. This article presents a detailed qualitative review of the various aspects of MtM beyond CMOS steep slope switches and their prospective integration technologies. For system level integration, various aspects of device performance and optimizations, related device-circuit interactions, dielectric technologies at the advance nanometer nodes have been probed into. Additionally, novel circuit topologies, synthesis algorithms and processor level performance evaluation using steep slope switches have been investigated. An exclusive compact overview for contemporary insights into integrated device-system development methodology and its performance evaluation is 
presented.