Least-squares phase-shifting algorithm of coherence scanning interferometry with windowed B-spline fitting, resampled and subdivided phase points for 3D topography metrology

Duan, Yiting; Li, Zexiao; Zhang, Xiaodong

doi:10.1016/j.measurement.2023.113103

Cited by 6 publications

(2 citation statements)

References 23 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…For example, point A meets the interference conditions at Z a , while point B meets them at Z b , so Z a and Z b , corresponding to the maximum value of the light-intensity envelope curve, represent the relative height of A and B, respectively, to the reference position. The relative heights of all points in the FOV are extracted to achieve the surface microscopic 3D topography by a white light interferometric data processing algorithm that combines local polarization with interpolation [18,19].…”

Section: Measurement Principle Of Surface Microscopic Topography Base...mentioning

confidence: 99%

“…Sensors 2023, 23, x FOR PEER REVIEW 3 of 15 corresponding to the maximum value of the light-intensity envelope curve, represent the relative height of A and B, respectively, to the reference position. The relative heights of all points in the FOV are extracted to achieve the surface microscopic 3D topography by a white light interferometric data processing algorithm that combines local polarization with interpolation [18,19]. We adopted the MV-CS200-10GC high-resolution color surface array CCD, which has a resolution of 20 million px.…”

Section: Measurement Principle Of Surface Microscopic Topography Base...mentioning

confidence: 99%

See 1 more Smart Citation

A Micro-Topography Measurement and Compensation Method for the Key Component Surface Based on White-Light Interferometry

Chen,

Wang,

Chen

et al. 2023

Sensors

View full text Add to dashboard Cite

The grinding grooves of material removal machining and the residues of a machining tool on the key component surface cause surface stress concentration. Thus, it is critical to carry out precise measurements on the key component surface to evaluate the stress concentration. Based on white-light interferometry (WLI), we studied the measurement distortion caused by the reflected light from the steep side of the grinding groove being unable to return to the optical system for imaging. A threshold value was set to eliminate the distorted measurement points, and the cubic spline algorithm was used to interpolate the eliminated points for compensation. The compensation result agrees well with the atomic force microscope (AFM) measurement result. However, for residues on the surface, a practical method was established to obtain a microscopic 3D micro-topography point cloud and a super-depth-of-field fusion image simultaneously. Afterward, the semantic segmentation network U-net was adopted to identify the residues in the super-depth-of-field fusion image and achieved a recognition accuracy of 91.06% for residual identification. Residual feature information, including height, position, and size, was obtained by integrating the information from point clouds and super-depth-of-field fusion images. This work can provide foundational data to study surface stress concentration.

show abstract

Section: Measurement Principle Of Surface Microscopic Topography Base...mentioning

confidence: 99%

Section: Measurement Principle Of Surface Microscopic Topography Base...mentioning

confidence: 99%

A Micro-Topography Measurement and Compensation Method for the Key Component Surface Based on White-Light Interferometry

Chen,

Wang,

Chen

et al. 2023

Sensors

View full text Add to dashboard Cite

show abstract

Noise analysis and correction on carrier phase in coherence scanning interferometry for high accuracy surface topography measurements

Ma,

Yin,

Yang

et al. 2025

Measurement

View full text Add to dashboard Cite

Study of etched surface topography with the compensation of contactless vibrational measurement errors

Podulka,

Knapčíková,

Tauberová

et al. 2025

Measurement

View full text Add to dashboard Cite

Least-squares phase-shifting algorithm of coherence scanning interferometry with windowed B-spline fitting, resampled and subdivided phase points for 3D topography metrology

Cited by 6 publications

References 23 publications

A Micro-Topography Measurement and Compensation Method for the Key Component Surface Based on White-Light Interferometry

A Micro-Topography Measurement and Compensation Method for the Key Component Surface Based on White-Light Interferometry

Noise analysis and correction on carrier phase in coherence scanning interferometry for high accuracy surface topography measurements

Study of etched surface topography with the compensation of contactless vibrational measurement errors

Contact Info

Product

Resources

About