LevCube: A six-degree-of-freedom magnetically levitated nanopositioning stage with centimeter-range XYZ motion

Heyman, Ian L.; Wu, Jingjie; Zhou, Lei

doi:10.1016/j.precisioneng.2023.04.008

Cited by 4 publications

(2 citation statements)

References 26 publications

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“…In recent years, with the rapid development of the precision manufacturing industry, magnetically levitated planar micromotors have become a hot research topic [ 3 ]. These devices have advantages such as no friction, no wear, and no noise and can achieve multi-degree-of-freedom precision motion in a vacuum environment [ 4 , 5 ]. Therefore, to meet the requirements of the precision manufacturing field for magnetically levitated planar micromotors, higher requirements have been placed on both mechanical structure design and motion control strategies [ 6 , 7 ].…”

Section: Introductionmentioning

confidence: 99%

GRU-ESO Strategy for a Distributed Coil Magnetically Levitated Planar Micromotor

Du,

Ming,

Ming

et al. 2024

Micromachines

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Traditional magnetic levitation planar micromotors suffer from poor controllability, short travel range, low interference resistance, and low precision. To address these issues, a distributed coil magnetically levitated planar micromotor with a gated recurrent unit (GRU)-extended state observer (ESO) control strategy is proposed in this paper. First, the structural design of the distributed coil magnetically levitated planar micromotor employs a separation of levitation and displacement, reducing system coupling and increasing controllability and displacement range. Then, theoretical analysis and model establishment of the system are conducted based on the designed distributed coil magnetically levitated planar micromotor and its working principles, followed by simulation verification. Finally, based on the established system model, a GRU-ESO controller is designed. An ESO feedback control term is introduced to enhance the system’s anti-interference capability, and the GRU feedforward compensation control term is used to improve the system’s tracking control accuracy. The experimental results demonstrate the reliability of the designed distributed coil magnetic levitation planar micromotor and the effectiveness of the controller.

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Section: Introductionmentioning

confidence: 99%

GRU-ESO Strategy for a Distributed Coil Magnetically Levitated Planar Micromotor

Du,

Ming,

Ming

et al. 2024

Micromachines

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“…This stage uses a combination of four Lorentz-force magnetically levitated linear motors to achieve an unlimited rotation motion range about the vertical axis. Heyman [8] designed a Lorentz force-based magnetically levitated stage which can achieve a 10 mm stroke in all XYZ directions. Gloess [9] presented a magnetically levitated hub actuator.…”

Section: Introductionmentioning

confidence: 99%

Design and Analysis of 5-DOF Compact Electromagnetic Levitation Actuator for Lens Control of Laser Cutting Machine

Zhao,

Zhang,

Pei

et al. 2024

Micromachines

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In laser beam processing, the angle or offset between the auxiliary gas and the laser beam axis have been proved to be two new process optimization parameters for improving cutting speed and quality. However, a traditional electromechanical actuator cannot achieve high-speed and high-precision motion control with a compact structure. This paper proposes a magnetic levitation actuator which could realize the 5-DOF motion control of a lens using six groups of differential electromagnets. At first, the nonlinear characteristic of a magnetic driving force was analyzed by establishing an analytical model and finite element calculation. Then, the dynamic model of the magnetic levitation actuator was established using the Taylor series. And the mathematical relationship between the detected distance and five-degree-of-freedom was determined. Next, the centralized control system based on PID control was designed. Finally, a driving test was carried out to verify the five-degrees-of-freedom motion of the proposed electromagnetic levitation actuator. The results show it can achieve a stable levitation and precision positioning with a desired command motion. It also proves that the proposed magnetic levitation actuator has the potential application in an off-axis laser cutting machine tool.

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Permanent Magnet Mover Position Detection of Halbach Maglev-Planar Motor Based on Hall Sensor Array for Unmanned Handling System

Yuan,

Yan,

Zhang

et al. 2024

Lecture Notes in Electrical Engineering

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LevCube: A six-degree-of-freedom magnetically levitated nanopositioning stage with centimeter-range XYZ motion

Cited by 4 publications

References 26 publications

GRU-ESO Strategy for a Distributed Coil Magnetically Levitated Planar Micromotor

GRU-ESO Strategy for a Distributed Coil Magnetically Levitated Planar Micromotor

Design and Analysis of 5-DOF Compact Electromagnetic Levitation Actuator for Lens Control of Laser Cutting Machine

Permanent Magnet Mover Position Detection of Halbach Maglev-Planar Motor Based on Hall Sensor Array for Unmanned Handling System

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