2020
DOI: 10.1016/j.electacta.2020.136668
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LiCoO2 thin film cathode sputtered onto 500 °C substrate

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Cited by 19 publications
(7 citation statements)
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“…The high temperature annealing treatments used in most studies place severe demands on the substrate material, which must act as the cathode current collector during battery operation but resist excessive oxidation and elemental interdiffusion during heat treatment, providing an additional incentive to reduce the annealing temperature. While many studies have used thin films of gold or platinum deposited on a ceramic [2,7,20,24,25,33,37,38], Filippin et al [18] have recently proposed the use of an oxidation resistant Ni-Al-Cr alloy, which may provide greater stability during annealing and cycling. Usually, the deposition rate achieved by RF sputtering is directly proportional to the power density applied to the target [39].…”
Section: Introductionmentioning
confidence: 99%
“…The high temperature annealing treatments used in most studies place severe demands on the substrate material, which must act as the cathode current collector during battery operation but resist excessive oxidation and elemental interdiffusion during heat treatment, providing an additional incentive to reduce the annealing temperature. While many studies have used thin films of gold or platinum deposited on a ceramic [2,7,20,24,25,33,37,38], Filippin et al [18] have recently proposed the use of an oxidation resistant Ni-Al-Cr alloy, which may provide greater stability during annealing and cycling. Usually, the deposition rate achieved by RF sputtering is directly proportional to the power density applied to the target [39].…”
Section: Introductionmentioning
confidence: 99%
“…They also used the same method to prepare LCO cathode on Al foil to fabricate flexible thin-film batteries [43]. The in situ annealing LCO cathode on a 500 • C substrate during the deposition process exhibits better crystal structure and electrochemical performance than the postannealing one in thin-film batteries reported by Wang et al, which illustrated the value of in situ annealing [44]. Zhang et al used the RF magnetron sputtering method to prepare thin-film batteries with lithium trivanadate (LVO) cathode and LiPON electrolyte [45].…”
Section: Future Perspectivesmentioning
confidence: 96%
“…13 Remarkably, the electrochemical window of LiPON is up to 5.5 V vs. Li + /Li, which can be well matched with a high-voltage cathode. 14,15 Very recently, the LiPON thin-film electrolyte has demonstrated its unique compatibility with conventional thick-film electrodes. Fu et al deposited a LiPON electrolyte layer on a Prussian blue composite cathode using magnetron sputtering, and then prepared a metallic Li thin-film anode via thermal evaporation.…”
mentioning
confidence: 99%