Proceedings of the 2006 IEEE International Symposium on Electronics and the Environment, 2006. 2006
DOI: 10.1109/isee.2006.1650071
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Life Cycle Inventory of a CMOS Chip

Abstract: Abstract-A life cycle inventory for comparative assessment of assorted semiconductor device types is assembled using a library of process step-related information. In this paper, we present the structure of this library of energy use, material inputs and emissions data at the process equipment-level and facilities-scale, normalized per wafer. Selected results from a case study of a 130nm node CMOS device are presented and compared with a previous study of a comparable chip. Comparative production impacts of 6-… Show more

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Cited by 16 publications
(11 citation statements)
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“…Analytical tools: defined here as: providing detailed and/or systematic analysis at specific stages of either the product development process or lifecycle e.g. eco-indicators; environmental effect analysis; environmental impact assessment; life cycle assessment; material, energy and toxicity ('MET') matrix; life cycle cost analysis (see for example [29][30][31][32][33][34]). …”
Section: Identification Of Eco-design Tools and Techniquesmentioning
confidence: 99%
“…Analytical tools: defined here as: providing detailed and/or systematic analysis at specific stages of either the product development process or lifecycle e.g. eco-indicators; environmental effect analysis; environmental impact assessment; life cycle assessment; material, energy and toxicity ('MET') matrix; life cycle cost analysis (see for example [29][30][31][32][33][34]). …”
Section: Identification Of Eco-design Tools and Techniquesmentioning
confidence: 99%
“…For example, the total water and energy consumptions of a semiconductor facility must take into account HVAC and clean-room systems [61].…”
Section: Ecological/cost Metric Choice Modelmentioning
confidence: 99%
“…For example, the total water and energy consumptions of a semiconductor facility must take into account HVAC and clean-room systems [21]. Supply Chain Scale: This level looks at the manufacturing enterprise including its entire supply chain.…”
Section: Descriptionmentioning
confidence: 99%