2013
DOI: 10.1016/j.egypro.2013.07.365
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Lift-off of Free-standing Layers in the Kerfless Porous Silicon Process

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Cited by 27 publications
(20 citation statements)
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“…Furthermore, reducing the pillar density will result in easier detachment. As the detachment front proceeds further into the sample area, the applied stress is redistributed on the remaining unbroken pillars and will be higher [12]. Thus, the progress of the detachment is easier once the detachment front has started to propagate a few cm into the laserdefined area, as long as the pillar size and density remain the same.…”
Section: Numerical Modeling Of the Detachment Processmentioning
confidence: 94%
See 3 more Smart Citations
“…Furthermore, reducing the pillar density will result in easier detachment. As the detachment front proceeds further into the sample area, the applied stress is redistributed on the remaining unbroken pillars and will be higher [12]. Thus, the progress of the detachment is easier once the detachment front has started to propagate a few cm into the laserdefined area, as long as the pillar size and density remain the same.…”
Section: Numerical Modeling Of the Detachment Processmentioning
confidence: 94%
“…Even though the total cross-sectional area of the silicon bridges is small, an enormous force needs to be applied in order to exceed the fracture strengths of the pillars if the force is applied normal to the HP-DL [12]. Thus, in order to make detachment easier, usually a moderate pulling force is applied from one of the edges or corners of the epitaxial film such that the force is concentrated on a few silicon bridges closest to the edge.…”
Section: Towards Achieving a High Detachment Yield In The Porous Silimentioning
confidence: 98%
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“…Currently, extensive research is focussed on low-cost methods for controllable fabrication of Si nanostructures. Among different methods to fabricate Si nanostructures, metal-assisted chemical etching (MACE) [1][2][3][4] is one of the promising techniques because of its simplicity, cost-effectiveness and versatility. Various Si nanostructures, for example, Si nanowires (SiNWs), porous Si, and mesoporous Si, have been successfully fabricated by this method, with specific control over their morphological features [5].…”
Section: Introductionmentioning
confidence: 99%