Solid-state
dewetting (SSD) on patterned substrates is a straightforward
method for fabricating ordered arrays of metallic nanoparticles on
surfaces. However, a drawback of this procedure is that the patterning
of substrates usually requires time-consuming and expensive two-dimensional
(2D) fabrication methods. Nanostructured thin films deposited by oblique
angle deposition (OAD) present at the surface a form of stochastically
arranged periodic bundles of nanocolumns that might act as a patterned
template for fabricating arrays of nanoparticles by SSD. In this work,
we explore this concept and investigate the effect of three different
types of OAD SiO2 thin films on the SSD of Au deposited
on their surface. We demonstrate that the size and spatial distribution
of the particles can be tailored through the surface morphology of
these OAD film substrates. It has been found that the SSD of the evaporated
Au layer gives rise to a bimodal size distribution of particles. A
majority of them appeared as mesoparticles with sizes ≳100
nm and the rest as nanoparticles with ∼10 nm, respectively,
located either on top of the nanocolumns following their lateral distribution
(i.e., resulting from a patterning effect) or incorporated inside
the open mesopores existing among them. Moreover, on the SiO2-OAD thin films where interconnected nanocolumnar bundles arrange
in the form of discrete motifs, the patterning effect gave rise to
the formation of approximately one Au mesoparticle per motif, which
is one of the assets of patterned SSD. The morphological, optical
(i.e., plasmon resonance), and crystalline structural characteristics
of Au mesoparticles suggest that the interplay between a discontinuous
nanocolumnar surface acting as a template and the poor adhesion of
Au onto SiO2 are key factors for the observed template
effect controlling the SSD on the surface of OAD thin films.