“…The substrate, film, and air layers are labeled with subscripts 1, 2, and 3, respectively. In the previous theoretical work, it was shown that the scattered electric field at point r within the waveguide from a source point r ′ can be obtained from the Green’s function approach as E ( m κ ) ( r ) = − k 0 2 ε 0 G⃡ ( m κ ) ( r , r′ ) · δ ε ↔ ( r′ ) · E ( m κ′ ) ( r′ ) where the indicators κ and κ′ = {0, 1} represent the {TE, TM} polarization and integers m 0 and m 1 label the waveguide modes; k 0 = 2π/λ 0 and ε 0 are the wavenumber and permittivity in vacuum, respectively; G⃡ ( m κ ) ( r , r ′) is the Green’s function corresponding to the m κ th waveguide mode, derived in the previous work, with detailed expressions given in the Appendix; δε⃡ ( r ′) is the dielectric perturbation at the source point; E ( m κ ′ ) ( r ′) is the incident guided-wave propagating in the m κ′ th waveguide mode.…”