Limit Cycle Oscillations in CW Laser-Driven NEMS

Aubin, Keith L.; Zalalutdinov, Maxim; Alan, Tuncay; Reichenbach, R.B.; Rand, Richard H.; Zehnder, Alan T.; Parpia, J. M.; Craighead, Harold G.

doi:10.1109/jmems.2004.838360

Cited by 99 publications

(95 citation statements)

References 32 publications

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“…Previously, torsional self-excitation by mode coupling 20 and a laser driven self resonant NEMS where the driving mechanism is cyclic heat dilatation 21 Figure 1d and Figure 2c. We show next that a model in which only electromechanical effects are involved explains our experiments.…”

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confidence: 88%

Self-Oscillations in Field Emission Nanowire Mechanical Resonators: A Nanometric dc−ac Conversion

et al. 2007

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RECEIVED DATE (to be automatically inserted after your manuscript is accepted if required according to the journal that you are submitting your paper to)We report the observation of self-oscillations in a bottom-up nanoelectromechanical system (NEMS) during field emission driven by a constant applied voltage. An electromechanical model is explored that explains the phenomenon and that can be directly used to develop integrated devices. In this first study we have already achieved ~50% DC/AC (direct to alternative current) conversion. Electrical selfoscillations in NEMS open up a new path for the development of high speed, autonomous nanoresonators, and signal generators and show that field emission (FE) is a powerful tool for building new nano-components.Within the nanodevice world, nanoelectromechanical systems (NEMS) based on resonant components are having a revolutionary impact on basic research in nanomechanics 1,2 and in technological

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confidence: 88%

Self-Oscillations in Field Emission Nanowire Mechanical Resonators: A Nanometric dc−ac Conversion

et al. 2007

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“…Experimental results for a disk-shaped oscillator [44] were fit using a 10-parameter model derived in [18]. First mode vibration was assumed, and a lumped parameter thermal model governing the average temperature, T , was coupled to a nonlinear oscillator model governing the displacement at the point of illumination, z.…”

Section: Modelingmentioning

confidence: 99%

Entrainment of Micromechanical Limit Cycle Oscillators in the Presence of Frequency Instability

Blocher

Zehnder

Rand

2013

J. Microelectromech. Syst.

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Abstract-The nonlinear dynamics of micromechanical oscillators are explored experimentally. Devices consist of singly and doubly supported Si beams, 200 nm thick and 35 μm long. When illuminated within a laser interference field, devices selfoscillate in their first bending mode due to feedback between laser heating and device displacement. Compressive prestress buckles doubly supported beams leading to a strong amplitude-frequency relationship. Significant frequency instability is seen in doubly supported devices. Self-resonant beams are also driven inertially with varying drive amplitude and frequency. Regions of primary, sub-, and superharmonic entrainment are measured. Statistics of primary entrainment are measured for low drive amplitudes, where the effects of frequency instability are measurable. Suband superharmonic entrainment are not seen in singly supported beams. A simple model is built to explain why high-order entrainment is seen only in doubly supported beams. Its analysis suggests that the strong amplitude-frequency relationship in doubly supported beams enables hysteresis, wide regions of primary entrainment, and high orders of sub-and superharmonic entrainment.[2012-0225]

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“…In previous works, MEMS devices consisting of a thin, planar, RF resonator [1,2,8,9] were studied. These devices were shown to self-oscillate in the absence of external forcing, when illuminated by a DC laser of sufficient amplitude.…”

Section: Introductionmentioning

confidence: 99%

“…In the presence of external forcing of sufficient strength and close enough in frequency to that of the unforced oscillation, the device will become frequency locked or get entrained by the forcer. A model was presented in [1,2,8,9], which consisted of a third-order system (c) Entrainment region obtained when sweeping the modulation frequency of the incident laser about 2ω with no inertial drive. From [2] of ODE's.…”

Section: Introductionmentioning

confidence: 99%

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Frequency locking in a forced Mathieu–van der Pol–Duffing system

2007

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Optically actuated radio frequency microelectromechanical system (MEMS) devices are seen to self-oscillate or vibrate under illumination of sufficient strength (Aubin, Pandey, Zehnder, Rand, Craighead, Zalalutdinov, Parpia (Appl. Phys. Lett. 83, 3281-3283, 2003)). These oscillations can be frequency locked to a periodic forcing, applied through an inertial drive at the forcing frequency, or subharmonically via a parametric drive, hence providing tunability. In a previous work (Aubin, Zalalutdinov, Alan, Reichenbach, Rand, Zehnder, Parpia, Craighead (IEEE/ASME J. Micromech. Syst. 13, [1018][1019][1020][1021][1022][1023][1024][1025][1026] 2004)), this MEMS device was modeled by a three-dimensional system of coupled thermo-mechanical equations requiring experimental observations and careful finite element simulations to obtain the model parameters. The resulting system of equations is relatively computationally expensive to solve, which could impede its usage in a complex network of such resonators. In this paper, we present a simpler model that shows similar behavior to the MEMS device. We investigate the dynamics of a Mathieu-van der Pol-Duffing equation, which is forced both parametrically and nonparametrically. It is shown that the steady-state response can consist of either 1:1 frequency locking, or 2:1 subharmonic locking, M. Pandey · R. H. Rand ( ) · A. T. Zehnder Department of Theoretical and Applied Mechanics, Cornell University, 207 Kimball Hall, Ithaca, NY 14853-1503, USA e-mail: rhr2@cornell.edu or quasiperiodic motion. The system displays hysteresis when the forcing frequency is slowly varied. We use perturbations to obtain a slow flow, which is then studied using the bifurcation software package AUTO.

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Limit Cycle Oscillations in CW Laser-Driven NEMS

Cited by 99 publications

References 32 publications

Self-Oscillations in Field Emission Nanowire Mechanical Resonators: A Nanometric dc−ac Conversion

Self-Oscillations in Field Emission Nanowire Mechanical Resonators: A Nanometric dc−ac Conversion

Entrainment of Micromechanical Limit Cycle Oscillators in the Presence of Frequency Instability

Frequency locking in a forced Mathieu–van der Pol–Duffing system

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