“…[10] Such structures can be used, for example, as active elements of precise positioning piezoelectric actuators. [11,12] The diffusion coefficients of copper ions in LN are relatively high (e.g., 500 times higher compared to iron ions [13,14] ), and the required annealing temperatures are relatively low (up to 800°C [10] ), which makes this material an attractive diffuser. However, the changes of mechanical properties of diffusion-modified layers depending on the diffusion depth remain unexplored, although this knowledge is important, [15][16][17][18] in particular for the analysis of actuators.…”