2000
DOI: 10.1143/jjap.39.6957
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Line Width Variation due to Global Topography

Abstract: To obtain the spun-on resist surface profile around a topographical feature, the analytical solution of an equation derived from mass continuity and the Navier-Stokes equation using the lubrication approximation was used. The final resist thickness profile was obtained by applying our previous experimental result of resist thickness reduction due to the soft bake process. We found that the difference in resist thickness could induce severe critical dimension variation. Since the resist height differences betwe… Show more

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Cited by 2 publications
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“…The study enrolls (2433) employees from (16) Maintaining health behaviors and having good health status are associated with less absenteeism (10) .…”
Section: Part Ii: Discussion Of the Housekeeping Services Staff Healt...mentioning
confidence: 99%
“…The study enrolls (2433) employees from (16) Maintaining health behaviors and having good health status are associated with less absenteeism (10) .…”
Section: Part Ii: Discussion Of the Housekeeping Services Staff Healt...mentioning
confidence: 99%
“…With increasing topographical variability and surface roughness, variability in habitat types and their diverse spatial configurations, as well as variation in the soil environment, will increase, and this will result in high species diversity 51,52,62,63 . In comparison, topographical variability and surface roughness in northern forests are lower because of the relatively gentle topography and small variation in elevation due to historical geological reasons and weaker rainfall erosion 69,70 . Therefore, E h values are greater for southern forests than for northern forests.…”
Section: Methodsmentioning
confidence: 99%