Linear and rotational thermal micro-stepper motors

Khiat, A.; Spronck, Jo W.; Schieveen, Jeroen van; Milosavljevic, S.; Wei, Jia; Estévez, P. A.; Sarro, P.M.; Staufer, U.

doi:10.1016/j.mee.2012.07.086

Cited by 5 publications

(4 citation statements)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Each number was used to designate the amount of nodal lines along the two orthogonal directions on the plane: the first one indicated the number of nodal lines in the longitudinal direction, while the second one indicated the number of nodal lines in the transverse direction. Three frequency ranges were studied: the low frequency (LF) range for the combination of modes (4,0) and (5,0); the intermediate frequency (IF) range with modes (10,0) and (11,0); and the high frequency (HF) range with modes (19,0) and (20,0). Figure 2 shows the mode shapes and the corresponding resonant frequencies obtained from a finite element method (FEM) modal analysis.…”

Section: Device Designmentioning

confidence: 99%

“…On the contrary, the miniaturization of actuators is still a challenge [3], especially in applications that require large displacements, high energy efficiency or output forces. In this regard, piezoelectric ultrasonic motors (USM) arose as a solution to obtaining a long motion range, high torque, quick response, high power to weight ratio and high efficiency in comparison to electrostatic, magnetic, and thermal approaches [4][5][6].…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Bidirectional Linear Motion by Travelling Waves on Legged Piezoelectric Microfabricated Plates

et al. 2020

View full text Add to dashboard Cite

This paper reports the design, fabrication and performance of MEMS-based piezoelectric bidirectional conveyors featuring 3D printed legs, driven by linear travelling waves (TW). The structures consisted of an aluminium–nitride (AlN) piezoelectric film on top of millimetre-sized rectangular thin silicon bridges and two electrode patches. The position and size of the patches were analytically optimised for TW generation in three frequency ranges: 19, 112 and 420 kHz, by the proper combination of two contiguous flexural modes. After fabrication, the generated TW were characterized by means of Laser–Doppler vibrometry to obtain the relevant tables of merit, such as the standing wave ratio and the average amplitude. The experimental results agreed with the simulation, showing the generation of a TW with an amplitude as high as 6 nm/V and a standing wave ratio as low as 1.46 for a device working at 19.3 kHz. The applicability of the fabricated linear actuator device as a conveyor was investigated. Its kinetic performance was studied with sliders of different mass, being able to carry a 35 mg silicon slider, 18 times its weight, with 6 V of continuous sinusoidal excitation and a speed of 0.65 mm/s. A lighter slider, weighting only 3 mg, reached a mean speed of 1.7 mm/s at 6 V. In addition, by applying a burst sinusoidal excitation comprising 10 cycles, the TW generated in the bridge surface was able to move a 23 mg slider in discrete steps of 70 nm, in both directions, which is a promising result for a TW piezoelectric actuator of this size.

show abstract

Section: Device Designmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Bidirectional Linear Motion by Travelling Waves on Legged Piezoelectric Microfabricated Plates

et al. 2020

View full text Add to dashboard Cite

show abstract

“…The miniaturization of actuators is an ongoing challenge, especially for applications that need large displacements, high energy efficiency, or output forces [1]. In search of high efficiency, torque and power to weight ratio, long motion range, and quick response, piezoelectric ultrasonic motors (USMs) have proven to be a suitable solution in comparison to electrostatic, magnetic, and thermal alternatives [2][3][4]. Notwithstanding the advantages of USM for linear motion, the difficulties in generating standing or travelling waves at high frequencies with enough amplitude make the scaling down of these motors to the millimeter range a challenge [5].…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric MEMS Linear Motor for Nanopositioning Applications

et al. 2021

View full text Add to dashboard Cite

This paper reports the design, fabrication, and performance of piezoelectric bidirectional conveyors based on microelectromechanical systems (MEMS) and featuring 3D-printed legs in bridge resonators. The structures consisted of aluminum-nitride (AlN) piezoelectric film on top of millimeter-sized rectangular thin silicon bridges and two electrode patches. The position and size of the patches were analytically optimized for travelling or standing wave generation, while the addition of 3D-printed legs allowed for a controlled contact and amplified displacement, a further step into the manufacturing of efficient linear motors. Such hybrid devices have recently demonstrated the conveyance of sliders of several times the motor weight, with speeds of 1.7 mm/s by travelling waves generated at 6 V and 19.3 kHz. In this paper both travelling and standing wave motors are compared. By the optimization of various aspects of the device such as the vibrational modes, leg collocation and excitation signals, speeds as high as 35 mm/s, and payloads above 10 times the motor weight were demonstrated. The devices exhibited a promising positional resolution while actuated with only a few sinusoidal cycles in an open-loop configuration. Discrete steps as low as 70 nm were measured in the conveyance of 2-mg sliders.

show abstract

“…The miniaturization of actuators for applications that need large displacements, high energy efficiency or output forces is an ongoing challenge [1]. Piezoelectric ultrasonic motors (USM) have proven to be a suitable solution to obtain long motion range, high torque, quick response, high power to weight ratio and high efficiency in comparison to electrostatic, magnetic, and thermal alternatives [2][3][4]. Despite the advantages of USM for linear motion, scaling down to the millimetre range remains a challenge due to the difficulties in generating standing or travelling waves at high frequencies with enough amplitude [5].…”

Section: Introductionmentioning

confidence: 99%