Linearity tests of silicon photodiodes for EUV radiation

Müller, Ralph H.; Scholze, Frank; Klein, R.; Plöger, Sven; Ulm, G.

doi:10.1016/j.jallcom.2005.04.167

Cited by 6 publications

(4 citation statements)

References 11 publications

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“…While for example AXUV and SXUV diodes can be calibrated against the SYRES spectrometer at the physikalisch-technische bundesanstalt (PTB) in Berlin to allow for an error of <0.3% [108][109][110], there are few beamlines that have such calibrated diodes available. Moreover, diode temperature [111], diode surface coverage [112], the position and size of the beam on the diode [113] and the maximum flux such diodes can handle [112] limit their lifetimes significantly and introduces large errors in absolute flux quantification. Additional errors are expected to result from the use of gold meshes instead of calibrated diodes.…”

Section: Dose Calculationsmentioning

confidence: 99%

A close look at dose: Toward L-edge XAS spectral uniformity, dose quantification and prediction of metal ion photoreduction

Schooneveld

DeBeer

2015

Journal of Electron Spectroscopy and Related Phenomena

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Section: Dose Calculationsmentioning

confidence: 99%

A close look at dose: Toward L-edge XAS spectral uniformity, dose quantification and prediction of metal ion photoreduction

Schooneveld

DeBeer

2015

Journal of Electron Spectroscopy and Related Phenomena

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“…In this region, the photodiode current was not linear to the incident beam intensity. 33,34) The measured relationship between the photodiode currents of PD DB and PD SiZr is shown in Fig. 7.…”

Section: -4mentioning

confidence: 99%

Development of a high-power EUV irradiation tool in a hydrogen atmosphere

Harada¹,

Yamakawa²,

Toyoda³

et al. 2021

Jpn. J. Appl. Phys.

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Extreme ultraviolet (EUV) lithography has recently been utilized as a high-volume manufacturing technology for advanced semiconductors. An EUV mirror can be easily contaminated in the existence of a residual hydrocarbon vapor gas inside an exposure chamber in a vacuum environment, which reduces the reflectance of the Mo/Si multilayer coating. To reduce this carbon contamination, hydrogen gas is introduced at a pressure of a few pascals in the EUV scanner. However, during this process, the multilayer may be damaged by hydrogen. In addition, the multilayer surface can become oxidized by residual water vapor in the vacuum chamber. Therefore, an EUV irradiation tool in hydrogen and water vapor atmospheres was developed and installed at BL-09 of the NewSUBARU synchrotron light facility to evaluate the cleaning effect and irradiation durability of the Mo/Si multilayer. The EUV irradiation intensity increased up to 6 W cm−2, and the hydrogen pressure reached 70 Pa.

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“…In this section, we address some recent work or possible examples for the application of the controlled variation of the photon flux or radiant power. Other examples are, e.g., the measurement of the linearity and saturation behaviour of semiconductor photodiodes [26].…”

Section: Further Applications and Measurementsmentioning

confidence: 99%

From single photons to milliwatt radiant power—electron storage rings as radiation sources with a high dynamic range

2010

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The spectral radiant intensity of synchrotron radiation from electron storage rings can be calculated from basic electrodynamic relations (Schwinger equation) and it is directly proportional to the stored electron beam current, i.e. the number of stored electrons. With the necessary equipment installed to measure and control the electron beam current over a wide dynamic range, the radiant intensity of the synchrotron radiation can be adjusted accordingly without changing the spectrum.This is done, e.g., at the Metrology Light Source (MLS), the dedicated electron storage ring of the Physikalisch-Technische Bundesanstalt. The MLS is operated as a primary radiation source standard from the near IR up to the soft x-ray region and its operational parameters can be adjusted and accurately measured in a wide range: the electron beam current can be varied from 1 pA (one stored electron) up to 200 mA and thus the radiant intensity can be changed by more than 11 decades. The photon flux or radiant power for typical angular acceptances can thus be varied from single photons to milliwatts. This is a very powerful tool, e.g., for the characterization of the linearity of the response of radiation detectors or for the calibration of photon counting detectors. In this article we present an overview of past, current and possible future activities exploiting this feature.

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Linearity tests of silicon photodiodes for EUV radiation

Cited by 6 publications

References 11 publications

A close look at dose: Toward L-edge XAS spectral uniformity, dose quantification and prediction of metal ion photoreduction

A close look at dose: Toward L-edge XAS spectral uniformity, dose quantification and prediction of metal ion photoreduction

Development of a high-power EUV irradiation tool in a hydrogen atmosphere

From single photons to milliwatt radiant power—electron storage rings as radiation sources with a high dynamic range

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