Rotational spectra of four rare isotopic species of OCS were observed in the 110-690GHz region with a source-modulated submillimeter-wave spectrometer. Spectral lines of 18O13CS, O13C36S, 18OC36S, and 18O13C34S were measured in their natural abundances, 21.4, 1.51, 0.29, and 0.95ppm, respectively. The rotational constants and centrifugal distortion constants were precisely determined from observed line frequencies by least squares methods. In order to facilitate sensitivity examination in the submillimeter-wave region, transition frequencies and peak absorption coefficients were calculated and tabulated for the spectral lines of the four species up to the 1000GHz region