Abstract:MScases causes problems during complementary SEM/EDS analyses when the sample is not transferred onto a different sample holder with regard to minimization of risk of its damage, loss or contamination. Therefore monocrystalline silicon plates with indicated conductivity of 5 Ω.cm -1 were tested in practice. This value is sufficient for SEM (based on measurements -carbon conductive strips specially intended for SEM have the conductivity of approx. 500 kΩ and higher). The plates with thickness of 300µm (±15µm) c… Show more
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