2022
DOI: 10.1088/2631-8695/ac61a1
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Liquid cooling of stacked piezoelectric actuators for high-power operation

Abstract: In this article, we propose a liquid cooling solution to reduce the temperature rise and expand the working range of stacked piezoelectric actuators (PEAs) for high-frequency and large-stroke operation. Based on an analysis and preliminary testing of the power dissipation and temperature rise, a specific liquid cooling solution for a single PEA is designed and its effectiveness is verified through experiments. To incorporate liquid cooling into a high-bandwidth fast steering mirror (FSM) system driven by PEAs,… Show more

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