1992
DOI: 10.1016/0168-1176(92)85018-u
|View full text |Cite
|
Sign up to set email alerts
|

Liquid metal ion sources and their applications

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1

Citation Types

0
2
0
1

Year Published

1994
1994
2024
2024

Publication Types

Select...
7
1

Relationship

0
8

Authors

Journals

citations
Cited by 10 publications
(3 citation statements)
references
References 45 publications
0
2
0
1
Order By: Relevance
“…Molecular and atomic ions are extractable from the surface of an electrified liquid through the agency of a strong electric field. This phenomenon serves as the foundation for the liquid metal ion sources (LMIS) that have found use in a variety of applications ranging from electric micropropulsion [1,2], etching and deposition [3], and analytical instrumentation [4]. Such broad technological utility has led to high levels of both empirical [5] and theoretically [6] development.…”
Section: Introductionmentioning
confidence: 99%
“…Molecular and atomic ions are extractable from the surface of an electrified liquid through the agency of a strong electric field. This phenomenon serves as the foundation for the liquid metal ion sources (LMIS) that have found use in a variety of applications ranging from electric micropropulsion [1,2], etching and deposition [3], and analytical instrumentation [4]. Such broad technological utility has led to high levels of both empirical [5] and theoretically [6] development.…”
Section: Introductionmentioning
confidence: 99%
“…이차이온화 [6][7][8] 정량분석에서 2-2-1. 일차이온컬럼 [9][10][11][12] 이차이온질량분석기는 일차이온을 생성하기 위해 주 2-2-2. 질량분석계 [13][14][15] 질량분석계(mass spectrometer)는 이중집속형 질량 2-3.…”
Section: 본론unclassified
“…Due to the superior performance, such ion sources found a multitude of applications, ranging from focused-ion-beam microprobes over mask/circuit repair and manipulation to lithography (see e.g. [1][2][3][4] and references therein). Due to their compact design, high reliability and low maintenance requirements, these sources are even used as ion thrusters for space crafts [5,6].…”
Section: Introductionmentioning
confidence: 99%