Liquid metal ion sources for FIB microfabrication systems — recent advances

Prewett, P. D.; Kellogg, E.

doi:10.1016/0168-583x(85)90624-x

Cited by 23 publications

(6 citation statements)

References 16 publications

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“…Figure 5 shows a mass spectrum of Pt 2 2+ ͑and Pt + ͒ for Ar + ion beam bombardment of the surface of a platinum metal foil at a sample voltage of 4580 V. Three isotopomers of Pt 2 2+ have been observed at half-integer m / z 194.5 ͑assigned to 194,195 had been observed in the mass analysis of the ion currents emitted from platinum-boron alloy liquid metal ion sources. 17 The mass resolution in the ion source testing experiments by the authors of Refs. 17͑a͒ and 17͑b͒ was too low to distinguish Pt 2 2+ from Pt + .…”

Section: Theoretical Methods and Computational Detailsmentioning

confidence: 99%

Observation of Zr22+, Cd22+, Hf22+, W22+, and Pt22+ in the gas phase

Franzreb

Diez

Alonso

2009

The Journal of Chemical Physics

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Five homonuclear diatomic dications Zr(2)(2+), Cd(2)(2+), Hf(2)(2+), W(2)(2+), and Pt(2)(2+) have been observed in the gas phase by mass spectrometry. These exotic doubly positively charged molecules were produced indirectly in the ion extraction region of a secondary ion mass spectrometer during sputtering of zirconium, cadmium, hafnium, tungsten, and platinum metal foils, respectively, by energetic high-current Ar(+) ion surface bombardment. They were detected in positive ion mass spectra at half-integer mz values for ion flight times of the order of approximately 10(-5) s. To our knowledge, these species had not been observed before. This experimental work confirms two theoretical investigations that had predicted that W(2)(2+) and Cd(2)(2+) are long-lived metastable species in the gas phase, but contradicts two theoretical studies that had suggested that Pt(2)(2+) should be unstable with respect to fragmentation. Therefore an advanced theoretical investigation of the ground state of Pt(2)(2+) was also performed. Our calculation shows that the ground state of Pt(2)(2+) is metastable with an internuclear equilibrium distance of 2.36 A, a dissociation energy (with respect to the top of the barrier) of 2.32 eV, and an ionization potential of Pt(2)(+) of about 15.8 eV. The latter theoretical result strongly suggests that Pt(2)(2+) dication formation in our experiment may have taken place via the resonant electron transfer process Pt(2)(+) + Ar(+) --> Pt(2)(2+) + Ar.

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Section: Theoretical Methods and Computational Detailsmentioning

confidence: 99%

Observation of Zr22+, Cd22+, Hf22+, W22+, and Pt22+ in the gas phase

Franzreb

Diez

Alonso

2009

The Journal of Chemical Physics

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“…However, a big step in the improvement of the spatial resolution (down to 10 nm) of such devices was associated with application of heavy-ion probes (such as Ga + , In + , Au + , etc.) extracted from liquid metal ion sources (LMIS) [24,25].…”

Section: Him Experimental Setupmentioning

confidence: 99%

Application of helium ion microscopy to nanostructured polymer materials

Bliznyuk

LaJeunesse

Boseman

2014

Nanotechnology Reviews

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Helium ion microscopy (HIM) is a relatively new high-resolution nanotechnology imaging and nanofabrication tool. HIM offers a near-molecular resolution (approaching that of TEM) combined with a simplicity of sample preparation and high depth of field similar to SEM. Simultaneously, the technique is not limited by the surface roughness as scanning probe microscopy (SPM) techniques or by the surface charging or radiation damage like SEM. In our review, we consider general principles, advantages, and prospects of HIM application in polymer science. Examples of high-resolution imaging of polymer-based nanocomposites, polymer nanoparticles, nanofibers, nanoporous materials, polymer nanocrystals, biopolymers, and polymer-based photovoltaic and sensor devices are presented. We compare the HIM's applicability with other modern imaging techniques: SPM and SEM.

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“…The UC SIM provides exceptional spatial resolution and analytical performance; these properties are routinely exploited in the characterization of a wide spectrum of materials (as examples of applications in the materials sciences, see: Chabala et al, 1987;Williams et al, 1987;Lampert et al, 1992). This instrument employs a 40-keV energy, c. 30-pA focused ~a ' primary ion beam extracted from a liquid metal ion source (Prewett & Kellogg, 1985). Secondary ions are mass-analysed with an RF quadrupole mass spectrometer.…”

Section: Capabilities Of Ion Microprobe Analysismentioning

confidence: 99%

Scanning ion microprobe analysis of composite materials

Williams

Soni

Tseng

et al. 1993

Journal of Microscopy

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SUMMARY Applications of scanning ion imaging with high lateral resolution in the microchemical investigation of metal – and ceramic‐matrix composites are described. The technique, which combines a scanning ion microprobe with secondary ion mass spectrometry (SIMS), is ideally suited to the study of complex, multicomponent composite structures. Most elements can be detected with good sensitivity, enabling the determination of spatial distributions for major and minor elements. Analytical images obtained with this technique reveal unprecedented chemical information about interfacial segregation and interdiffusion phenomena. As examples, the characterization of both ceramic–matrix (Al borate–SiC) and metal–matrix (Ni alloy–Al2O3) composite materials is described.

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Liquid metal ion sources for FIB microfabrication systems — recent advances

Cited by 23 publications

References 16 publications

Observation of Zr22+, Cd22+, Hf22+, W22+, and Pt22+ in the gas phase

Observation of Zr22+, Cd22+, Hf22+, W22+, and Pt22+ in the gas phase

Application of helium ion microscopy to nanostructured polymer materials

Scanning ion microprobe analysis of composite materials

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