TiO 2 -modified silica-based MCM-41 (Si-MCM-41) was prepared by liquid phase deposition (LPD) without a conventional fluorine scavenger such as H 3 BO 3 . TiO 2 was deposited on Si-MCM-41 by LPD reactions for 148 h. Using Si-MCM-41, TiO 2 was deposited on the inner surface of silica with etching phenomena. After the LPD reactions, Si species were detected in the reaction solution as a result of etching phenomena of silica. It was confirmed that Si-MCM-41 also acted as a fluorine scavenger by dissolving and forming hexafluorosilicate in aqueous hexafluorotitanate solution. The deposition behavior was greatly influenced by the volume of the reaction solution. The photocatalytic activity of the modified Si-MCM-41 was much higher than that of conventional catalysts such as TiO 2 :P25.Porous materials are currently a major field of investigation for power-storage 1 and catalytic substances 2 because they provide large areas for these reactions. Metal oxides have a variety of functions such as electrical transport, magnetism, and optical responses. When these metal oxides can be prepared with porous structures, their functions are expected to be enhanced compared with those of nonporous materials, for the above reasons.TiO 2 itself has wide range of functions; in particular, highly active TiO 2 -MCM-41 has been proposed for various applications such as photocatalysts and electrode materials, because they have functional surfaces. However, high crystallinity causes a lack of structural ordering of mesoporous materials.3,4 TiO 2 thin films can be prepared by the controlled hydrolysis equilibrium of titaniumfluoro complexes by adding a fluorine scavenger, the so-called liquid phase deposition (LPD) process, 3 on various kinds of nanomaterials. In previous reports, various fluorine scavengers such as H 3 BO 3 and Fe(NO 3 ) 3 have been investigated.58 When such fluorine scavengers are used, the deposition species will infiltrate voids, and this is known as the liquid phase infiltration (LPI) process. In this study, we prepared TiO 2 -modified mesoporous silica Si-MCM-41 by the LPD method, without any conventional fluorine scavenger such as H 3 BO 3 . On-site (pore surface) synthesis of TiO 2 is expected when using solid materials as the fluorine scavenger. The stability of the fluoro complex is subject to the stability constant. When dipping the SiO 2 in the aqueous titaniumfluoro complex solution, since SiF 6 2¹ ions have large dissociation constants (pK d ca. 30), 10 TiF 6 2¹ is thought to be hydrolyzed to TiO 2 (pK d ca. 12).11 When choosing a solid-state scavenger, surface modification is expected and a large reaction field can be provided for the catalytic application. The reaction in this study is expressed by the following chemical reaction.Because MCM-41 has a well-defined structure and large specific surface area, we think that it can be used as a model case for surface modification on a highly structured material. While silica can have an arbitrary shape depending on its process, the surface is mostly inert for r...