Atomic layer deposition (ALD) is an attractive approach for precisely controllable and conformal coating on nanoparticles (NPs). Compared with flat substrates, NPs have very large specific surface area, form agglomerate and stack together during deposition. Therefore, special reactor and process are needed to promote the precursor diffusion for uniform deposition and efficient process. In this paper, an ALD reactor is introduced which uses fluidization to facilitate precursor transport and couples rotation to intensify the dynamic dismantling of soft-agglomerates, exposing individual particle to precursors. In situ mass spectrometry monitoring of the reaction shows nearly 100% precursor utilization with proper deposition process. The linear relationship of statistical element mass concentrations with deposition cycles demonstrates the precise controllability. The microscale morphology of the Al2O3 coated SiO2, Fe3O4, CeO2 and AlH3 NPs shows the uniformity and conformity of the films on individual particles, which reveals the generosity of the reactor on various nanostructures.