LiTaO<sub>3</sub>and LiNbO<sub>3</sub>Epitaxial Films

Калинников, В. Т.; Gromov, O. G.; Kuz’min, A. P.; Куншина, Г. Б.; Локшин, Э. П.; Сидоров, Н. В.

doi:10.1023/b:inma.0000020530.68461.08

Cited by 3 publications

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“…The first reports on the growth of c ‐axis‐oriented LN films by liquid phase epitaxy on an LT substrate and by RF sputtering on C ‐sapphire substrates appeared in early seventies . Since then these substrates were widely studied for the growth of the Z ‐LN and Z ‐LT films by different methods: LPE, epitaxial growth by melting, RF sputtering pulsed laser deposition (PLD), molecular beam epitaxy (MBE), metal organic, and aqueous precursor solutions, sol–gel, spin coating, microwave oven method, and chemical vapor deposition (CVD) and its derivatives such as thermal plasma CVD, pulsed metal–organic CVD (MOCVD), pulsed‐injection (PI) MOCVD, spray MOCVD, atmospheric pressure aerosol MOCVD, solid source flash evaporation, combinatorial high‐vacuum CVD, atomic layer deposition (ALD), etc. In the following sections, we summarize the problems and the applied strategies for the optimization of growth of high‐quality LN–LT layers.…”

Section: Growth Of Linbo3 and Litao3 Films By Chemical And Physical Mmentioning

confidence: 99%

Toward High‐Quality Epitaxial LiNbO₃ and LiTaO₃ Thin Films for Acoustic and Optical Applications

Bartasyte

Margueron

Baron

et al. 2017

Adv Materials Inter

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In 1928, Zachariasen discovered the LiNbO 3 phase. [1] The first single crystals were grown using the flux method by Matthias Over the past five decades, LiNbO 3 and LiTaO 3 single crystals and thin films have been studied intensively for their exceptional acoustic, electro-optical, and pyroelectric and ferroelectric properties. Today, LiNbO 3 single crystals in electro-optics are equivalent to silicon in electronics, and about 70% of radio-frequency (RF) filters, based on surface acoustic waves, are fabricated on these single crystals. These materials in the form of thin films are needed urgently for the development of the next-generation of high-frequency and/or wide-band RF filters or tuneable frequency filters adapted to the fifth generation of infrastructures/networks/communications. The integration of LiNbO 3 films in guided nanophotonic devices will allow higher operational frequencies, wider bandwidth, and miniaturized optical devices in line with improved electronic conversion. Here, the challenges and the achievements in the epitaxial growth of LiTaO 3 and LiNbO 3 thin films and their integration with silicon technology and to acoustic and guided nanophotonic devices are discussed in detail. The systematic representation and classification of all epitaxial relationships reported in the literature have been carried out in order to help the prediction of the epitaxial orientations in the new heterostructures. Future prospects of potential applications and the expected performances of thin film devices are overviewed, as well.Figure 2. Schematic representation of the layer transfer process by the ion slicing technique consisting of a) ion implantation, b) wafer bonding, c) laser irradiation or heating in order to obtain d) a single crystalline layer on the host (Si) substrate. Reproduced with permission. [53]Figure 3. a,b) Electron microscopy images and c) schematic diagram of a microresonator based on LiNbO 3 film on Si and fabricated by the layer transfer technique. Reproduced with permission. [53]The first reports on the growth of c-axis-oriented LN films by liquid phase epitaxy on an LT substrate and by RF sputtering Adv. Mater. Interfaces 2017, 4, 1600998 www.advmatinterfaces.de www.advancedsciencenews.com Figure 6. Frequency response of a) HBAR and b) FBAR based on thinned X-cut LiNbO 3 layer on Si. Schematic representations of a) HBAR and b) FBAR structures are given in the insets. Reproduced with permission. [78]

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Section: Growth Of Linbo3 and Litao3 Films By Chemical And Physical Mmentioning

confidence: 99%

Toward High‐Quality Epitaxial LiNbO₃ and LiTaO₃ Thin Films for Acoustic and Optical Applications

Bartasyte

Margueron

Baron

et al. 2017

Adv Materials Inter

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Synthesis of Complex Oxides of Rare Elements of Groups IV and V (A Review)

et al. 2005

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The prospects of using various methods of synthesis for producing extra-pure complex oxides of alkali and bivalent elements with rare elements of groups IV and V of precisely prescribed chemical and granulometric compositions are analyzed. It is demonstrated that only the sol-gel method with inorganic precursors yields nanosize powders of narrow granulometric classes. Epitaxial coatings based on complex oxides can be synthesized by the sol-gel method using organic precursors or true solutions of reactant components.Tantalates and niobates of alkali elements, titanates and zirconates of magnesium, strontium, barium, and lead, as well as solid solutions based on them possess ferroelectric and nonlinear-optical properties and can be used in the form of monocrystals, ceramics, micro-and nanosize powders, or thin films. The purpose of our study is the comparative evaluation of methods for synthesizing such compounds.The most common is the sintering method when initial components are mixed, the mixture is charged into cuvettes and subjected to heat treatment. Depending on the composition of the product synthesized and the choice of initial components, heat treatment is performed at a temperature of 900 -1300°C. The process depends on the diffusion of the low-melting component into the grains of the component with the higher-melting temperature. At early stages, compounds with the maximum absolute variation in Gibbs' energy are formed [1]. They have a higher melting or decomposition temperature than other compounds present in the system. If an intermediate phase emerges in synthesis, whose melting temperature is higher than the melting temperature of the initial components, it acts as a barrier determining the process kinetics.As a rule, a series of intermediate compounds are formed. For instance, in the synthesis of Pb(NbO 3 ) 2 by sintering Nb 2 O 5 and PbO [2], initially a multiphase layer is formed on the surface of Nb 2 O 5 particles, which contains 3PbO × Nb 2 O 5 , the solid solution 5PbO × 2Nb 2 O 5 -2PbO × Nb 2 O 5 , and 3PbO × 2Nb 2 O 5 ; in doing so, PbO is fully consumed. The phases PbO × Nb 2 O 5 and PbO × 2Nb 2 O 5 have not been registered in the reaction product layer, which contradicts the common assumption that all phase existent in a system should be formed sequentially. At the second stage, 3PbO × Nb 2 O 5 is consumed and the layer of the solid solution 5PbO × 2Nb 2 O 5 -2PbO × Nb 2 O 5 increases significantly. At the third stage, PbO is removed from the solid solution, reaching the ultimate composition of 2PbO × Nb 2 O 5 . Next, a lead metaniobate layer emerges and slowly grows, whereas the thickness of the layer 3PbO × 2Nb 2 O 5 increases sharply due to the transformation of 2PbO × Nb 2 O 5 into the specified phase. When 2PbO × Nb 2 O 5 nearly disappears, the lead metaniobate layer is just a few nanometers thick and the reaction product is mainly represented by the phase 3PbO × 2Nb 2 O 5 . Finally, the layer Pb(NbO 3 ) 2 formed in the reaction of 3PbO × 2Nb 2 O 5 with Nb 2 O 5 becomes expanded.The e...

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Synthesis of micro-and nanocrystalline powders of alkali metaniobates and metatantalates

et al. 2007

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LiTaO₃and LiNbO₃Epitaxial Films

Cited by 3 publications

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Toward High‐Quality Epitaxial LiNbO₃ and LiTaO₃ Thin Films for Acoustic and Optical Applications

Toward High‐Quality Epitaxial LiNbO₃ and LiTaO₃ Thin Films for Acoustic and Optical Applications

Synthesis of Complex Oxides of Rare Elements of Groups IV and V (A Review)

Synthesis of micro-and nanocrystalline powders of alkali metaniobates and metatantalates

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LiTaO3and LiNbO3Epitaxial Films

Cited by 3 publications

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Toward High‐Quality Epitaxial LiNbO3 and LiTaO3 Thin Films for Acoustic and Optical Applications

Toward High‐Quality Epitaxial LiNbO3 and LiTaO3 Thin Films for Acoustic and Optical Applications

Synthesis of Complex Oxides of Rare Elements of Groups IV and V (A Review)

Synthesis of micro-and nanocrystalline powders of alkali metaniobates and metatantalates

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Product

Resources

About

LiTaO₃and LiNbO₃Epitaxial Films

Toward High‐Quality Epitaxial LiNbO₃ and LiTaO₃ Thin Films for Acoustic and Optical Applications

Toward High‐Quality Epitaxial LiNbO₃ and LiTaO₃ Thin Films for Acoustic and Optical Applications