Lithography

Vladimirsky, Yuli

doi:10.1016/b978-012617560-8/50032-3

Cited by 5 publications

(2 citation statements)

References 12 publications

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“…The principle of lithography is to use a photoresist to transfer the pattern from the mask plate to the silicon wafer or other media layer and to obtain a specific pattern shape after exposure and development [ 77 ]. Lithography processes can use different photoresists (also known as resists) and there are two different processes, namely positive resist lithography and negative resist lithography [ 78 ]. As shown in Figure 6 b, Cui et al [ 17 ] reported a new type of capacitive flexible pressure sensor, which has the characteristics of high sensitivity, fast mechanical response, wide working pressure range, durability, and good repeatability, etc.…”

Section: Materials and Processes For Fabricating Flexible Sensorsmentioning

confidence: 99%

Manipulator Control System Based on Flexible Sensor Technology

Chen,

Wang,

Chen

et al. 2023

Micromachines

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The research on the remote control of manipulators based on flexible sensor technology is gradually extensive. In order to achieve stable, accurate, and efficient control of the manipulator, it is necessary to reasonably design the structure of the sensor with excellent tensile strength and flexibility. The acquisition of manual information by high-performance sensors is the basis of manipulator control. This paper starts with the manufacturing of materials of the flexible sensor for the manipulator, introduces the substrate, sensor, and flexible electrode materials, respectively, and summarizes the performance of different flexible sensors. From the perspective of manufacturing, it introduces their basic principles and compares their advantages and disadvantages. Then, according to the different ways of wearing, the two control methods of data glove control and surface EMG control are respectively introduced, the principle, control process, and detection accuracy are summarized, and the problems of material microstructure, reducing the cost, optimizing the circuit design and so on are emphasized in this field. Finally, the commercial application in this field is explained and the future research direction is proposed from two aspects: how to ensure real-time control and better receive the feedback signal from the manipulator.

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Section: Materials and Processes For Fabricating Flexible Sensorsmentioning

confidence: 99%

Manipulator Control System Based on Flexible Sensor Technology

Chen,

Wang,

Chen

et al. 2023

Micromachines

View full text Add to dashboard Cite

show abstract

“…The principle of lithography is to use a photoresist to transfer the pattern from the mask plate to the silicon wafer or other media layer and to obtain a specific pattern shape after exposure and development [77]. Lithography processes can use different photoresists (also known as resists) and there are two different processes, namely positive resist lithography and negative resist lithography [78]. As shown in Figure 6b, Cui et al [17] reported a new type of capacitive flexible pressure sensor, which has the characteristics of high sensitivity, fast mechanical response, wide working pressure range, durability, and good repeatability, etc.…”

Section: Lithographymentioning

confidence: 99%

Manipulator Control System Based on the Flexible Sensor Technology

Chen¹,

Wang²,

Chen³

et al. 2023

Preprint

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With the development of artificial intelligence technology, manipulators, as an important part of the work of intelligent robots, can replace humans to perform various complex tasks. In recent years, there have been many studies on the remote control of manipulators using various control technologies. Starting from the manufacturing materials of flexible sensors used for manipulators, this paper introduces the base materials, sensing materials, and flexible electrode materials of flexible sensors, respectively, and summarizes the performance of flexible sensors made based on the characteristics of different materials. The basic principles of dipping and coating, lithography, inkjet printing, screen printing, 3D printing and so on are introduced from the perspective of flexible sensor manufacturing process. Some different functions of sensors achieved by different structural designs, such as: tensile cracking, microchannels, etc. are also introduced. Then, from the perspective of recognition accuracy of the manipulator, two kinds of control methods based on flexible sensor by data glove control and surface EMG control are classified and introduced, and the problems existing in three aspects of flexible sensor material preparation, manufacturing process and control series design are summarized. Finally, the possible future research directions in this field are suggested.

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