Lithography hotspot detection through multi-scale feature fusion utilizing feature pyramid network and dense block
Hui Xu,
Ye Yuan,
Ruijun Ma
et al.
Abstract:Lithography hotspot (LHS) detection is crucial for achieving manufacturability design in integrated circuits (ICs) and ensuring the final yield of ICs chips. Recognizing the challenges posed by conventional deep learning-based methods for lithographic hotspot detection in meeting the demands of advanced IC manufacturing accuracy, this study introduces an LHS detection approach. This approach leverages multiscale feature fusion to identify defects in lithographic layout hotspots accurately. This method incorpor… Show more
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