Lithography system holistic optimization with low stage vibration sensitivity

Naiyuan, 盛乃援 Sheng; Yanqiu, 李艳秋 Li; Pengzhi, 韦鹏志 Wei; Lihui, 刘丽辉 Liu

doi:10.3788/irla201948.1215001

Cited by 1 publication

(1 citation statement)

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“…Micro-vibration is a small perturbation with a small vibration amplitude, generally ≤5 μm, and a frequency bandwidth between 0.1 and 500 Hz, which has the characteristics of micro-amplitude, wide frequency domain, and multiple degrees of freedom. 1–3 Because the amplitude of micro-vibration is very small and the frequency band is widely dispersed, it is difficult for ordinary detection equipment to find, and the influence of micro-vibration on ordinary equipment is often ignored, but in optical equipment, 4–6 ultra-precision machining, 7–9 semiconductor packaging, 10 and other fields, micro-vibration greatly affects the actuation accuracy and stability of the system end-effector.…”

Section: Introductionmentioning

confidence: 99%

Design of micro-vibration suppression platform based on piezo-stack array intelligent structure

Wang

Zhang

et al. 2022

Proceedings of the Institution of Mechanical Engineers, Part C:

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Micro-vibration seriously affects the precision and stability of precision mechanical systems. Aiming at the micro-vibration existing in the semiconductor package positioning system, this paper first designed an active-passive integrated actuator (APIA) based on piezo-stack array, which compensated the mechanical error through the piezo-stack array to improve its positioning accuracy. Based on the APIA, a 6-PUU parallel micro-vibration suppression platform (MVSP) was designed, in which the two APIAs were combined into one and installed on the lower platform along the tangential distribution of the circle, and then the kinematic model of the platform was established. Finally, the PID control algorithm was used to conduct vibration isolation experiments on the MVSP. The experimental results showed that the MVSP had good vibration isolation performance for micro-vibration, the vibration isolation frequency band was above 5 Hz, and the attenuation of micro-vibration signals was between 18% and 64%.

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