Load Insensitive Servomechanism with Damping Compensator

Abstract

To meet the increasing demands for the more refined semiconductor design rules and the more enhanced optical disk memory density, a very fine motion control based upon numerical control technology such as under submicron meter encoder feedback is required. The first major subject is how to keep a desired motion clear of elasticity of feeding mechanism. The second one is how to keep a load insensitive motion free from change of load and influence of disturbance. In this pa-