Local Anodic Oxidation Patterning of Au Deposited Si Surfaces

Abstract

Nanopatterning of Si(100) surfaces deposited with Au films from physical and chemical methods, has been carried out using a AFM set up mounted with a conducting tip. At a tip bias of -12 V, the LAO patterns drawn on various Au/SiOx surfaces have been compared with those on bare Si. The height of the oxide patterns is several times higher in the case of Au covered Si surfaces compared to patterns on bare Si surface. The enhancement in LAO is related to the catalytic activity of Au nanoparticulates at SiOx interface.

Study of Thermal Electrical Modified Etching for Glass and Its Application in Structure Etching

“…Besides that, EDX results plotted in Figure 13 show that the oxygen content in deteriorated Ti/Pt/Au is higher than normal region. The relevant results have been reported by Reference [22]. Those works reveals that Si is prone to be anodically oxidated with Au, Mo, and Cr metal in a strong electric field at atmosphere.…”