“…Force sensors [279][280][281][282][283][284][285] Object detection [286][287][288] Acceleration [289][290][291][292][293] Gyro sensors [294][295][296][297][298][299] Bio sensors 234,256,257,[300][301][302] Gas=chemical sensors 186,233,240,243,[246][247][248]250,251,253,254,261,303,304) Application of piezoelectric thin films 214,215,218,305) Microfluidic control 306) Continued on next page:…”