Local environments surrounding magnetic ions in Mn-or Cr-doped and hydrogenated amorphous Si films have been determined using extended x-ray absorption fine structure ͑EXAFS͒ method. These films are found to be ferromagnetic with high Curie temperatures above 250 K and therefore are of tremendous interest for practical spintronics applications. Our EXAFS results indicate that these material systems are nearly free of dopant clusters and oxides up to an unusually high dopant concentration of 20-22 at. %. As the dopant concentration increases, the saturation magnetization in the Cr-doped samples is decreased while that in the Mn-doped sample remains practically unchanged. Antiferromagnetic coupling of magnetic ions and enhancement of carrier-mediated ferromagnetism are proposed to account for the different concentration dependence of magnetization in the Cr-and Mn-doped samples.Ferromagnetic semiconductors are of pivotal importance for the development of semiconductor spintronics. 1,2 Apart from III-V diluted magnetic semiconductors ͑DMS͒, which have been extensively studied during the past decades, group IV DMSs such as Mn-doped Ge and Si have recently attracted considerable interest. [3][4][5][6] Owing to their compatibility with Si-based semiconductor industry, group IV ferromagnetic DMSs are especially suited for constructing spininjecting components to be incorporated into existing electronic devices. High Curie temperatures above room temperature have been reported in both Mn-and Cr-doped Si making this class of materials promising candidates for practical spintronic applications. To increase the solubility of magnetic ions in Si, hydrogenated amorphous silicon has also been used to replace the crystalline Si host and results in improved magnetic properties. 7,8 However, the usefulness of DMSs in spintronics as spinpolarized current injector relies not only on the apparent ferromagnetism of the materials but also on the detailed structure of the magnetic ions in the semiconductor host. Formation of magnetic clusters or phase separation in the matrix materials may dominate the ferromagnetism of the DMS while lacking direct effects on the itinerant carriers in the host. In addition, we note that practical applications of amorphous semiconductors in spintronics are also challenged by spin-conserving problems in spin injection. Since the magnetic dopant atoms in general do not possess long-range structural order, x-ray or neutron diffraction is not useful for probing the locations of magnetic ions in the semiconductor host. On the other hand, the short-range-order method of extended x-ray absorption fine structure ͑EXAFS͒ is uniquely suited for this purpose. 9-13 In the present work, we employed the EXAFS technique to probe the local structures surrounding magnetic Mn and Cr atoms in ferromagnetic Mn-doped and Cr-doped amorphous Si thin-film samples prepared by magnetron co-sputtering method. In such materials, not only the dopant but also the host does not have long-range structural order. The local structural i...