2022
DOI: 10.4236/ampc.2022.1211019
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Local Tuning of the Surface Potential in Silicon Carriers by Ion Beam Induced Intrinsic Defects

Abstract: The immobilization of biomaterials on a carrier is the first step for many different applications in life science and medicine. The usage of surface-near electrostatic forces is one possible approach to guide the charged biomaterials to a specific location on the carrier. In this study, we investigate the effect of intrinsic defects on the surface potential of silicon carriers in the dark and under illumination by means of Kelvin probe force microscopy. The intrinsic defects were introduced into the carrier by… Show more

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