2022
DOI: 10.1103/prxquantum.3.020312
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Localization and Mitigation of Loss in Niobium Superconducting Circuits

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Cited by 43 publications
(26 citation statements)
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“…In addition, Figure a shows that the sample cleaned with BOE still had a higher δ int than that of the sample cleaned with BOE and passivated with SAM after fabrication. This is because of the regrowth process of oxide layers on surfaces and interfaces of the resonators on the exposure of the sample to the ambient environment after cleaning by BOE and before loading into the ADR (approximately 1 h for wire bonding and packaging before the sample is loaded under vacuum inside the ADR (see the Materials and Methods section)) . The microwave signals at low and high powers for the four devices are shown in Figure b,c, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…In addition, Figure a shows that the sample cleaned with BOE still had a higher δ int than that of the sample cleaned with BOE and passivated with SAM after fabrication. This is because of the regrowth process of oxide layers on surfaces and interfaces of the resonators on the exposure of the sample to the ambient environment after cleaning by BOE and before loading into the ADR (approximately 1 h for wire bonding and packaging before the sample is loaded under vacuum inside the ADR (see the Materials and Methods section)) . The microwave signals at low and high powers for the four devices are shown in Figure b,c, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…XPS is now commonly used to identify the presence of superconductor surface oxides in qubit circuits. Recent works include investigating the presence of Nb [48][49][50], NbTi [51], NbTiN [13], TiN [52], Al [52] and Ta [35,36] oxides, and how the oxide regrows [50]. The oxide presence, processing steps or surface treatments can then be correlated with resonator quality factor measurements [49,50,52,53].…”
Section: Surface Analysis Applied To Superconducting Quantum Circuitsmentioning
confidence: 99%
“…Worth mentioning here is also electron back-scattered diffraction, a SEM-based analogous technique, which avoids any structural damage induced by the preparation of TEM samples. Electron energy loss spectroscopy (EELS) is a useful technique for investigating interfaces for information on local chemical composition and bonding mechanisms [49,64]. It has been applied to study the influence of substrate treatments, where the presence of oxides can be correlated resonator loss, most notably recently carried out for Al [41] and Nb [48,49,69].…”
Section: Surface Analysis Applied To Superconducting Quantum Circuitsmentioning
confidence: 99%
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