2006
DOI: 10.1002/adma.200501991
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Localized Functionalization of Single Nanopores

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Cited by 106 publications
(109 citation statements)
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“…21 Structures studied had a low aspect ratio (~1), thus the diameter and the length of the pores were comparable. The shape of the pores was approximated as a cylinder.…”
Section: Sin Nanoporesmentioning
confidence: 99%
“…21 Structures studied had a low aspect ratio (~1), thus the diameter and the length of the pores were comparable. The shape of the pores was approximated as a cylinder.…”
Section: Sin Nanoporesmentioning
confidence: 99%
“…A small variation in the membrane thickness [19] or a small instability in the beam current can result in a pore that is either too shallow or too wide. Contrary to the methods in which a wide pore is shrunk by successive processing steps [15][16][17][18][19][20][21][22][23][24][25][26][27][28], our method is based upon one single processing step. Techniques that are based on surface-tension-driven mass flow, such as ion beam sculpting [16] and electron beam induced drilling [17], have produced pores with diameters as small as 2 nm.…”
Section: Discussionmentioning
confidence: 99%
“…Liquid phase silane based chemistries are the most commonly used technique to functionalize individual nanopores in such insulating membranes. [84,115] While these surface chemistries have been characterized in detail on planar surfaces, questions still remain as to the exact packing density, molecular orientation and thickness of SAM's in a highly confined environment that is a nanopore. In addition, nanopores formed via TEM decompositional sputtering processes typically exhibit high surface roughness, high surface curvature and a non-stoichiometric material composition due to selective material sputtering, as observed in SiO 2 and Si 3 N 4 nanopores, [78,116] further complicating the nanopore functionalization process.…”
Section: Hybrid Biological/solid-state Nanoporesmentioning
confidence: 99%
“…One such method involves the localized deposition of a tetraethylorthosilicate (TEOS) based oxide ring around the nanopore. [115] A focused ion beam was used to decompose the TEOS precursor near the Si nanopore surface, attractive to anionic dsDNA. [119] The resulting strong electrostatic polymer-pore interactions enabled the detection of short dsDNA molecules, typically under the detection limits of conventional solid state nanopore sensors.…”
Section: Hybrid Biological/solid-state Nanoporesmentioning
confidence: 99%