Long‐term performance analysis of chemical filters in clean rooms based on a prediction model

Abstract

Chemical filters are the most important devices for removing gas-phase pollutants in clean rooms. However, the testing concentration of chemical filters is too high for reflecting their performance in a real clean room environment. This study tested the adsorption performance of chemical filters in the two most commonly used shapes at different concentrations. Then, the Langmuir equation and Wheeler-Jonas kinetic How to cite this article: Zhi Y, Liu J, Liu K. Long-term performance analysis of chemical filters in clean rooms based on a prediction model.