The mobility of flux vortices in high temperature superconductors in general, and YBa 2 Cu 3 O 7-δ (YBCO) thin films in particular, is an essential limiting factor determining the performance of superconducting devices, such as Josephson junctions and magnetic field sensors. Flux noise properties and critical current density can be improved by adding artificial defects serving as pinning centers. A simple and effective technique to obtain such defects is decorating the substrate with prefabricated nano-particles before YBCO film deposition. A number of materials, such as CeO 2 [1], Y 2 O 3 [2, 3] as well as MgO, BaZrO 3 and Ir [4][5][6], have successfully been tested in this regard.In this work we utilized the tendency of thin gold (Au) layers to self-assemble nano-scale particles at elevated temperatures during deposition of the YBCO film. A similar technique has been presented for vortex pinning in YBCO thin films by Mikheenko et al. [7]. It allows to control the particle size over a range of a few nanometers to one micron and can be utilized to lower the contact resistance to bonding wires [8,9], which often is the source of current noise. The aim of this work is to analyze particle formation and size distribution as well as crystallographic properties of the particles and the circumjacent YBCO film.Prior to the growth of the YBCO films a thin gold layer was deposited on SrTiO 3 (STO) single crystal substrates under high vacuum conditions (p 0 < 5 × 10 -4 Pa). For layer thicknesses up to 20 nm this was accomplished by pulsed laser deposition using a KrF excimer laser (λ = 248 nm) at a repetition rate of 10 Hz and a laser fluence of 1.3 J/cm 2 at the target. Under these conditions the growth rate was 4.4 nm/min. Thicker Au layers were grown by dc-sputtering to limit the deposition time.Subsequently, the substrate was heated to 750 °C. Again using the KrF excimer laser a 150 nm thick YBCO film was then grown in an atmosphere of pure oxygen 2 O ( p = 50 Pa). The repetition rate was set to 5 Hz and the laser fluence to 2.2 J/cm 2 . After deposition the film was slowly cooled to room temperature at a rate of 50 K/min in an oxygen atmosphere of 2 O p = 8 × 10 4 Pa. During film growth small particles evolve from the Au layer.Transmission electron microscopic (TEM) images show that particles having diameters much smaller than the YBCO film thickness preferentially grow at the YBCO In order to improve transport and noise properties of YBa 2 Cu 3 O 7-δ thin films, we studied a technique to produce gold nano-particles in these films. We report on the formation of these particles from thin gold layers during pulsed laser deposition of YBa 2 Cu 3 O 7-δ . Depending on initial gold layer thickness we analyzed their size distribution and structural properties. Gold particles preferentially grow at the YBa 2 Cu 3 O 7-δ surface and the SrTiO 3 /YBa 2 Cu 3 O 7-δ interface and show an epitaxial alignment parallel to the YBCO 001 direction. We discuss the influence of these particles on the crystal structure of YBa 2 Cu 3 O 7-δ in...