Wide field-of-view (FOV) optical functionality is crucial for implementation of long wavelength infrared (LWIR) imaging device. Traditionally, wide-angle LWIR imaging requires complex assembly of multiple optical components, which increases the weight and complexity of LWIR imaging system. Here, we propose a metalens array based on all-silicon for wide-angle imaging at 10μm wavelength. To reduce coma induced by the focusing of wide-angle incident light, the phase distribution of each metalens is carefully designed by intentionally introduced shifted phase terms. After stitching the images of each metalens into a complete wide-angle image, wide-angle LWIR imaging of >60° can be achieved. We fabricate the metalens array and experimentally demonstrate focusing and imaging over the entire FOV. Our device is essential for the miniaturization of LWIR imaging system, laying the technical foundation for the development of the next generation highperformance infrared imaging systems.
1.IntroductionLong-wavelength infrared (LWIR) imaging is a key technology for security surveillance, medical imaging, and non-contact thermal imaging [4,6]. Now, many infrared imaging applications have strict requirements on the size, weight and power of the system, such as intelligent wearable devices and UAV infrared thermography, so it is very important to find a lightweight infrared imaging design scheme [5,7]. However, the traditional dielectric lens processing techniques determine the lenses with bulky volume and curved surface, so that most of current imaging systems are an assemblage of discrete bulk optical components rather than a set of seamlessly integrated components, making it difficult to miniaturize infrared optics devices [1,2,4].Metasurface is an array of planar micro and nano structures based on subwavelength microstructures to modulate electromagnetic wave properties. By designing the parameters of subwavelength micro-nano-structures, the metasurface can achieve flexible modulation of the amplitude, phase, and polarization of light [10]. The imaging